Inventor · disambiguated record
Jon E. Lieberman
Also filed as: LIEBERMAN JON E · LIEBERMAN JON ERIK
3 granted patents·60 citations·filing 1989–2001
70Inventor score
Technology areasH01J
Top patents by PatentIndex Score
3 records- 0175US5909658AHigh speed electron beam lithography pattern processing systemIBM·Filed 1996·Granted Jun 1, 1999·38 cites·18 claims
- 0275US4945246ATri-deflection electron beam systemIBM·Filed 1989·Granted Jul 31, 1990·21 cites·13 claims
- 0348US6573514B2Method for aligning electron beam projection lithography toolNIKON CORP·Filed 2001·Granted Jun 3, 2003·1 cites·11 claims
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