Inventor · disambiguated record
Der-Fang Huang
Also filed as: HUANG DER-FANG
3 granted patents·1 pending application·45 citations·filing 1999–2003
68Inventor score
Files withTAIWAN SEMICONDUCTOR MFG4
Top patents by PatentIndex Score
4 records- 0183US6436851B1Method for spin coating a high viscosity liquid on a waferTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Aug 20, 2002·39 cites·20 claims
- 0233US2004188547A1Developer dispensing nozzle with movable shutter platesTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
- 0330US6153497AMethod for determining a cause for defects in a film deposited on a waferTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Nov 28, 2000·3 cites·18 claims
- 0429US6308576B1Method for determining stress effect on a film during scrubber cleanTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Oct 30, 2001·3 cites·18 claims
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