Inventor · disambiguated record
Tomoo Motosugi
Also filed as: MOTOSUGI TOMOO
7 granted patents·3 pending applications·27 citations·filing 2007–2025
78Inventor score
Top patents by PatentIndex Score
10 records- 0186US9190245B2Charged particle beam writing apparatus, and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Nov 17, 2015·6 cites·11 claims
- 0286US8309283B2Method and apparatus for writingKATO YASUO·Filed 2009·Granted Nov 13, 2012·13 cites·9 claims
- 0382US9147552B2Charged particle beam writing method and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Sep 29, 2015·7 cites·18 claims
- 0466US10217606B2Charged particle beam drawing method and charged particle beam drawing apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Feb 26, 2019·1 cites·9 claims
- 0563US2025323017A1Multiple charged-particle beam writing method and multiple charged-particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 0659US11244807B2Settling time determination method and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2020·Granted Feb 8, 2022·0 cites·7 claims
- 0742US2007243487A1Forming method of resist pattern and writing method of charged particle beamNUFLARE TECHNOLOGY INC·Filed 2007·Application pending·0 cites
- 0836US9852883B2Charged particle beam drawing apparatus and charged particle beam drawing methodNUFLARE TECHNOLOGY INC·Filed 2017·Granted Dec 26, 2017·0 cites·8 claims
- 0936US2010178611A1Lithography method of electron beamNUFLARE TECHNOLOGY INC·Filed 2010·Application pending·0 cites
- 1032US9583310B2Charged particle beam writing apparatus, charged particle beam writing method, and shot correction method of charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Feb 28, 2017·0 cites·20 claims
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