Inventor · disambiguated record
Anca Mihaela Antonevici
Also filed as: ANTONEVICI ANCA MIHAELA
3 granted patents·1 pending application·6 citations·filing 2009–2018
59Inventor score
Top patents by PatentIndex Score
4 records- 0183US8953142B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted Feb 10, 2015·6 cites·23 claims
- 0261US10018925B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jul 10, 2018·0 cites·21 claims
- 0361US2018292762A1Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
- 0460US9606429B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 28, 2017·0 cites·20 claims
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