Inventor · disambiguated record
Hironobu Yabuta
Also filed as: YABUTA HIRONOBU
9 granted patents·3 pending applications·31 citations·filing 2006–2023
82Inventor score
Files withUSHIO ELECTRIC INC12
Top patents by PatentIndex Score
12 records- 0181US11774856B2Extreme ultraviolet light source deviceUSHIO ELECTRIC INC·Filed 2021·Granted Oct 3, 2023·2 cites·6 claims
- 0273US7705334B2Extreme ultraviolet radiation source deviceUSHIO ELECTRIC INC·Filed 2007·Granted Apr 27, 2010·10 cites·16 claims
- 0373US7459708B2Extreme UV radiation source device and method for eliminating debris which forms within the deviceUSHIO ELECTRIC INC·Filed 2006·Granted Dec 2, 2008·10 cites·3 claims
- 0469US7479645B2Device for producing extreme UV radiationUSHIO ELECTRIC INC·Filed 2006·Granted Jan 20, 2009·8 cites·6 claims
- 0562US12399437B2Debris mitigation device and light source apparatus including the sameUSHIO ELECTRIC INC·Filed 2023·Granted Aug 26, 2025·0 cites·13 claims
- 0661US9599812B2Foil trap and light source device using such foil trapUSHIO ELECTRIC INC·Filed 2014·Granted Mar 21, 2017·1 cites·16 claims
- 0758US11822258B2Foil trap and light source apparatus including the sameUSHIO ELECTRIC INC·Filed 2022·Granted Nov 21, 2023·0 cites·13 claims
- 0849US2023288821A1Extreme ultraviolet light source apparatusUSHIO ELECTRIC INC·Filed 2021·Application pending·0 cites
- 0948US12321107B2Extreme ultraviolet light source device and protection method for receiving plate memberUSHIO ELECTRIC INC·Filed 2021·Granted Jun 3, 2025·0 cites·15 claims
- 1044US9572240B2Light source apparatusUSHIO ELECTRIC INC·Filed 2014·Granted Feb 14, 2017·0 cites·18 claims
- 1141US2024004317A1Rotary foil trap and light source deviceUSHIO ELECTRIC INC·Filed 2021·Application pending·0 cites
- 1241US2023418171A1Foil trap cover device and debris reduction apparatusUSHIO ELECTRIC INC·Filed 2021·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →