Inventor · disambiguated record
Lalita A. Balasubramanian
Also filed as: BALASUBRAMANIAN LALITA A
2 granted patents·183 citations·filing 2005–2008
67Inventor score
Top patents by PatentIndex Score
2 records- 0195US8126255B2Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functionsBHASKAR KRIS·Filed 2008·Granted Feb 28, 2012·174 cites·61 claims
- 0273US8532949B2Computer-implemented methods and systems for classifying defects on a specimenTEH CHO HUAK·Filed 2005·Granted Sep 10, 2013·9 cites·24 claims
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