Inventor · disambiguated record
Victor M. Benveniste
Also filed as: BENVENISTE VICTOR · BENVENISTE VICTOR M
82 granted patents·10 pending applications·1,556 citations·filing 1979–2016
99Inventor score
Files withAXCELIS TECH INC32EATON CORP20VARIAN SEMICONDUCTOR EQUIPMENT17BENVENISTE VICTOR3VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3
Top patents by PatentIndex Score
92 records- 0196US7888653B2Techniques for independently controlling deflection, deceleration and focus of an ion beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Feb 15, 2011·33 cites·28 claims
- 0295US6770888B1High mass resolution magnet for ribbon beam ion implantersAXCELIS TECH INC·Filed 2003·Granted Aug 3, 2004·51 cites·15 claims
- 0392US8436318B2Apparatus for controlling the temperature of an RF ion source windowSINCLAIR FRANK·Filed 2010·Granted May 7, 2013·16 cites·18 claims
- 0492US6835930B2High mass resolution magnet for ribbon beam ion implantersAXCELIS TECH INC·Filed 2004·Granted Dec 28, 2004·33 cites·11 claims
- 0591US8129695B2System and method for controlling deflection of a charged particle beam within a graded electrostatic lensKELLERMAN PETER L·Filed 2009·Granted Mar 6, 2012·15 cites·19 claims
- 0691US7700925B2Techniques for providing a multimode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Apr 20, 2010·11 cites·14 claims
- 0791US6759665B2Method and system for ion beam containment in an ion beam guideAXCELIS TECH INC·Filed 2001·Granted Jul 6, 2004·34 cites·16 claims
- 0891US6414329B1Method and system for microwave excitation of plasma in an ion beam guideAXCELIS TECH INC·Filed 2000·Granted Jul 2, 2002·32 cites·25 claims
- 0991US5780863AAccelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanterEATON CORP·Filed 1997·Granted Jul 14, 1998·69 cites·30 claims
- 1091US4303860AHigh resolution radiation detectorAMERICAN SCIENCE & ENG INC·Filed 1979·Granted Dec 1, 1981·38 cites·12 claims
- 1190US6881966B2Hybrid magnetic/electrostatic deflector for ion implantation systemsAXCELIS TECH INC·Filed 2003·Granted Apr 19, 2005·35 cites·34 claims
- 1289US6677598B1Beam uniformity and angular distribution measurement systemAXCELIS TECH INC·Filed 2003·Granted Jan 13, 2004·44 cites·22 claims
- 1389US5026997AElliptical ion beam distribution method and apparatusEATON CORP·Filed 1989·Granted Jun 25, 1991·40 cites·7 claims
- 1488US6664547B2Ion source providing ribbon beam with controllable density profileAXCELIS TECH INC·Filed 2002·Granted Dec 16, 2003·28 cites·24 claims
- 1588US5703375AMethod and apparatus for ion beam neutralizationEATON CORP·Filed 1996·Granted Dec 30, 1997·54 cites·22 claims
- 1687US8604443B2System and method for manipulating an ion beamSINCLAIR FRANK·Filed 2010·Granted Dec 10, 2013·8 cites·13 claims
- 1787US8501624B2Excited gas injection for ion implant controlKOO BON-WOONG·Filed 2008·Granted Aug 6, 2013·11 cites·6 claims
- 1887US8471476B2Inductively coupled plasma flood gun using an immersed low inductance FR coil and multicusp magnetic arrangementKURUNCZI PETER F·Filed 2010·Granted Jun 25, 2013·10 cites·23 claims
- 1987US8357912B2Techniques for providing a multimode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Granted Jan 22, 2013·6 cites·17 claims
- 2086US7675047B2Technique for shaping a ribbon-shaped ion beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Mar 9, 2010·9 cites·20 claims
- 2186US6956225B1Method and apparatus for selective pre-dispersion of extracted ion beams in ion implantation systemsAXCELIS TECH INC·Filed 2004·Granted Oct 18, 2005·23 cites·25 claims
- 2286US6135128AMethod for in-process cleaning of an ion sourceEATON CORP·Filed 1998·Granted Oct 24, 2000·80 cites·10 claims
- 2385US8188448B2Temperature controlled ion sourceBENVENISTE VICTOR·Filed 2010·Granted May 29, 2012·8 cites·12 claims
- 2485US7019314B1Systems and methods for ion beam focusingAXCELIS TECH INC·Filed 2004·Granted Mar 28, 2006·20 cites·29 claims
- 2585US6872953B1Two dimensional stationary beam profile and angular mappingAXCELIS TECH INC·Filed 2004·Granted Mar 29, 2005·21 cites·20 claims
- 2685US6541781B1Waveguide for microwave excitation of plasma in an ion beam guideAXCELIS TECH INC·Filed 2000·Granted Apr 1, 2003·22 cites·25 claims
- 2785US6476399B1System and method for removing contaminant particles relative to an ion beamAXCELIS TECH INC·Filed 2000·Granted Nov 5, 2002·23 cites·23 claims
- 2884US5661308AMethod and apparatus for ion formation in an ion implanterEATON CORP·Filed 1996·Granted Aug 26, 1997·61 cites·13 claims
- 2983US9297063B2Plasma potential modulated ion implantation systemRADOVANOV SVETLANA B·Filed 2012·Granted Mar 29, 2016·4 cites·20 claims
- 3083US7598505B2Multichannel ion gunAXCELIS TECH INC·Filed 2005·Granted Oct 6, 2009·6 cites·25 claims
- 3183US7550751B2Ion beam scanning control methods and systems for ion implantation uniformityAXCELIS TECH INC·Filed 2007·Granted Jun 23, 2009·8 cites·19 claims
- 3283US6885014B2Symmetric beamline and methods for generating a mass-analyzed ribbon ion beamAXCELIS TECH INC·Filed 2002·Granted Apr 26, 2005·18 cites·31 claims
- 3383US6774377B1Electrostatic parallelizing lens for ion beamsAXCELIS TECH INC·Filed 2003·Granted Aug 10, 2004·19 cites·20 claims
- 3483US6534775B1Electrostatic trap for particles entrained in an ion beamAXCELIS TECH INC·Filed 2000·Granted Mar 18, 2003·30 cites·18 claims
- 3582US7807983B2Technique for reducing magnetic fields at an implant locationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Oct 5, 2010·8 cites·16 claims
- 3682US7579602B2Ion implantation with a collimator magnet and a neutral filter magnetVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Aug 25, 2009·6 cites·14 claims
- 3782US5736743AMethod and apparatus for ion beam formation in an ion implanterEATON CORP·Filed 1996·Granted Apr 7, 1998·32 cites·46 claims
- 3880US6664548B2Ion source and coaxial inductive coupler for ion implantation systemAXCELIS TECH INC·Filed 2002·Granted Dec 16, 2003·15 cites·23 claims
- 3979US6833710B2Probe assembly for detecting an ion in a plasma generated in an ion sourceAXCELIS TECH INC·Filed 2001·Granted Dec 21, 2004·21 cites·14 claims
- 4079US6703628B2Method and system for ion beam containment in an ion beam guideAXCELISS TECHNOLOGIES INC·Filed 2003·Granted Mar 9, 2004·29 cites·36 claims
- 4179US5814819ASystem and method for neutralizing an ion beam using water vaporEATON CORP·Filed 1997·Granted Sep 29, 1998·32 cites·16 claims
- 4279US5554857AMethod and apparatus for ion beam formation in an ion implanterEATON CORP·Filed 1995·Granted Sep 10, 1996·29 cites·12 claims
- 4378US7078712B2In-situ monitoring on an ion implanterAXCELIS TECH INC·Filed 2004·Granted Jul 18, 2006·23 cites·54 claims
- 4478US4914305AUniform cross section ion beam systemEATON CORP·Filed 1989·Granted Apr 3, 1990·22 cites·8 claims
- 4577US7078707B1Ion beam scanning control methods and systems for ion implantation uniformityAXCELIS TECH INC·Filed 2005·Granted Jul 18, 2006·5 cites·20 claims
- 4675US7267520B2Wafer scanning system with reciprocating rotary motion utilizing springs and counterweightsAXCELIS TECH INC·Filed 2005·Granted Sep 11, 2007·5 cites·22 claims
- 4774US7112809B2Electrostatic lens for ion beamsAXCELIS TECH INC·Filed 2004·Granted Sep 26, 2006·10 cites·32 claims
- 4874US7033443B2Gas-cooled clamp for RTPAXCELIS TECH INC·Filed 2003·Granted Apr 25, 2006·17 cites·22 claims
- 4974US6879109B2Thin magnetron structures for plasma generation in ion implantation systemsAXCELIS TECH INC·Filed 2003·Granted Apr 12, 2005·10 cites·47 claims
- 5073US9018829B2Excited gas injection for ion implant controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Apr 28, 2015·2 cites·12 claims
Showing the top 50 of 92 patent records by PatentIndex Score.
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