Inventor · disambiguated record
Xiaoqiang Yao
Also filed as: YAO XIAOQIANG · YAO XIAOQIANG S · YAO XIAOQIANG SEAN
4 granted patents·2 pending applications·7 citations·filing 1991–2025
66Inventor score
Top patents by PatentIndex Score
6 records- 0194US12217972B2Multi-state pulsing for achieving a balance between bow control and mask selectivityLAM RES CORP·Filed 2020·Granted Feb 4, 2025·3 cites·26 claims
- 0263US2025140565A1Multi-state pulsing for achieving a balance between bow control and mask selectivityLAM RES CORP·Filed 2025·Application pending·0 cites
- 0354US2007128849A1Waferless automatic cleaning after barrier removalLAM RES CORP·Filed 2007·Application pending·0 cites
- 0446US7001529B2Pre-endpoint techniques in photoresist etchingLAM RES CORP·Filed 2003·Granted Feb 21, 2006·2 cites·25 claims
- 0531US7211518B2Waferless automatic cleaning after barrier removalLAM RES CORP·Filed 2004·Granted May 1, 2007·0 cites·12 claims
- 0624US5236691ATernary metal-rich sulfide with a layered structureUNIV IOWA STATE RES FOUND INC·Filed 1991·Granted Aug 17, 1993·2 cites·2 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →