Inventor · disambiguated record
Akihito Yoshino
Also filed as: YOSHINO AKIHITO
6 granted patents·2 pending applications·296 citations·filing 2007–2022
80Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0196US9970112B2Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2015·Granted May 15, 2018·279 cites·10 claims
- 0286US8999858B2Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2012·Granted Apr 7, 2015·7 cites·16 claims
- 0384US8304328B2Manufacturing method of semiconductor device and substrate processing apparatusMAEDA TAKAHIRO·Filed 2007·Granted Nov 6, 2012·10 cites·26 claims
- 0468US11728159B2Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Granted Aug 15, 2023·0 cites·26 claims
- 0558US11257669B2Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2019·Granted Feb 22, 2022·0 cites·22 claims
- 0649US2013068159A1Manufacturing Method of Semiconductor Device and Substrate Processing ApparatusHITACHI INT ELECTRIC INC·Filed 2012·Application pending·0 cites
- 0745US11515152B2Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrateKOKUSAI ELECTRIC CORP·Filed 2020·Granted Nov 29, 2022·0 cites·16 claims
- 0844US2009017638A1Substrate processing apparatus and method for manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2008·Application pending·0 cites
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