Inventor · disambiguated record
Dominicus Jacobus Petrus Adrianus Franken
Also filed as: FRANKEN DOMINICUS J · FRANKEN DOMINICUS JACOBUS PETR · FRANKEN DOMINICUS JACOBUS PETRUS · FRANKEN DOMINICUS JACOBUS PETRUS A
29 granted patents·364 citations·filing 1991–2008
97Inventor score
Files withASML NETHERLANDS BV22ASML HOLDING NV2AMSL NETHERLANDS BV1ASML NETHERLAND BV1BLEEKER ARNO JAN1
Top patents by PatentIndex Score
29 records- 0195US6788386B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2002·Granted Sep 7, 2004·75 cites·16 claims
- 0288US6765712B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Jul 20, 2004·30 cites·26 claims
- 0388US5150153ALithographic device with a suspended object tablePHILIPS CORP·Filed 1991·Granted Sep 22, 1992·66 cites·9 claims
- 0484US7436484B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 14, 2008·20 cites·17 claims
- 0583US7554105B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jun 30, 2009·6 cites·22 claims
- 0682US7999914B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Aug 16, 2011·5 cites·19 claims
- 0780US7151588B2Lithographic apparatus and a method of compensating for thermal deformation in a lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Dec 19, 2006·18 cites·31 claims
- 0878US7411652B2Lithographic apparatus and device manufacturing methodASML HOLDING NV·Filed 2004·Granted Aug 12, 2008·13 cites·14 claims
- 0977US7035056B2Piezoelectric actuator and a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2002·Granted Apr 25, 2006·16 cites·12 claims
- 1076US7460208B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 2, 2008·5 cites·38 claims
- 1175US7362415B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 22, 2008·15 cites·20 claims
- 1275US6750949B2Lithographic apparatus and device manufacturing methodAMSL NETHERLANDS BV·Filed 2002·Granted Jun 15, 2004·19 cites·28 claims
- 1371US7049592B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted May 23, 2006·10 cites·16 claims
- 1469US8159647B2Lithographic apparatus and device manufacturing methodBLEEKER ARNO JAN·Filed 2008·Granted Apr 17, 2012·2 cites·26 claims
- 1567US7110083B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Sep 19, 2006·8 cites·14 claims
- 1666US7397531B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 8, 2008·9 cites·25 claims
- 1766US7116399B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Oct 3, 2006·8 cites·16 claims
- 1866US6734949B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2002·Granted May 11, 2004·8 cites·14 claims
- 1965US8908144B2Lithographic apparatus and device manufacturing methodGROENEVELD ROGIER HERMAN MATHIJS·Filed 2006·Granted Dec 9, 2014·3 cites·11 claims
- 2062US7474384B2Lithographic apparatus, device manufacturing method, and a projection element for use in the lithographic apparatusASML HOLDING NV·Filed 2004·Granted Jan 6, 2009·6 cites·25 claims
- 2160US7307262B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 11, 2007·6 cites·20 claims
- 2258US6967756B2Lithographic apparatus device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Nov 22, 2005·4 cites·34 claims
- 2357US7525637B2AssemblyASML NETHERLANDS BV·Filed 2008·Granted Apr 28, 2009·0 cites·13 claims
- 2456US7804584B2Integrated circuit manufacturing methods with patterning device position determinationASML NETHERLAND BV·Filed 2008·Granted Sep 28, 2010·0 cites·20 claims
- 2556US7126671B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 24, 2006·5 cites·12 claims
- 2655US7471373B2Lithographic apparatus with patterning device position determinationASML NETHERLANDS BV·Filed 2004·Granted Dec 30, 2008·3 cites·23 claims
- 2754US7161658B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jan 9, 2007·3 cites·17 claims
- 2848US7474378B2Assembly, a lithographic apparatus, and a device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jan 6, 2009·1 cites·13 claims
- 2941US7508494B2Lithographic apparatus and a subtrate table for exciting a shockwave in a substrateASML NETHERLANDS BV·Filed 2006·Granted Mar 24, 2009·0 cites·22 claims
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