Inventor · disambiguated record
Chih-Pen Yen
Also filed as: YEN CHIH-PEN
3 granted patents·1 pending application·33 citations·filing 2002–2002
68Inventor score
Files withTAIWAN SEMICONDUCTOR MFG4
Top patents by PatentIndex Score
4 records- 0174US6815653B2Method and apparatus for early detection of material accretion and peeling in plasma systemTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Nov 9, 2004·25 cites·14 claims
- 0252US6708565B2Ultrasonic wafer blade vibration detectingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 23, 2004·6 cites·20 claims
- 0340US7354555B2Gas flow control system with interlockTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Apr 8, 2008·2 cites·20 claims
- 0430US2003198542A1Cassette pod stage equipped with locked guide pinsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →