Inventor · disambiguated record
Imad Mahawili
Also filed as: MAHAWILI IMAD
27 granted patents·21 pending applications·3,508 citations·filing 1980–2023
98Inventor score
Files withMAHAWILI IMAD11MICRO C TECHNOLOGIES INC8EDWARDS VACUUM LLC5ENERGY RECOVERY TECHNOLOGY LLC5E NET LLC2
Top patents by PatentIndex Score
48 records- 0199US6090212ASubstrate platform for a semiconductor substrate during rapid high temperature processing and method of supporting a substrateMICRO C TECHNOLOGIES INC·Filed 1997·Granted Jul 18, 2000·721 cites·53 claims
- 0299US4993358AChemical vapor deposition reactor and method of operationWATKINS JOHNSON CO·Filed 1989·Granted Feb 19, 1991·369 cites·29 claims
- 0398US6800830B2Chemistry for boron diffusion barrier layer and method of application in semiconductor device fabricationHITACHI INT ELECTRIC INC·Filed 2001·Granted Oct 5, 2004·248 cites·51 claims
- 0498US6530994B1Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processingMICRO C TECHNOLOGIES INC·Filed 1999·Granted Mar 11, 2003·416 cites·41 claims
- 0597USRE37546EReactor and method of processing a semiconductor substrateMICRO C TECHNOLOGIES INC·Filed 2000·Granted Feb 12, 2002·201 cites·61 claims
- 0697US5814365AReactor and method of processing a semiconductor substateMICRO C TECHNOLOGIES INC·Filed 1997·Granted Sep 29, 1998·237 cites·42 claims
- 0797US4315523AElectronically controlled flow meter and flow control systemAMERICAN FLOW SYSTEMS INC·Filed 1980·Granted Feb 16, 1982·196 cites·11 claims
- 0896US6007635APlatform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processingMICRO C TECHNOLOGIES INC·Filed 1997·Granted Dec 28, 1999·228 cites·24 claims
- 0996US5951896ARapid thermal processing heater technology and method of useMICRO C TECHNOLOGIES INC·Filed 1996·Granted Sep 14, 1999·226 cites·52 claims
- 1095US5059770AMulti-zone planar heater assembly and method of operationWATKINS JOHNSON CO·Filed 1989·Granted Oct 22, 1991·155 cites·25 claims
- 1195US4550684ACooled optical window for semiconductor wafer heatingGENUS INC·Filed 1983·Granted Nov 5, 1985·77 cites·11 claims
- 1292US8178987B2Wind turbineMAHAWILI IMAD·Filed 2010·Granted May 15, 2012·14 cites·21 claims
- 1384US6783627B1Reactor with remote plasma system and method of processing a semiconductor substrateKOKUSAI SEMICONDUCTOR EQUIPMEN·Filed 2000·Granted Aug 31, 2004·32 cites·42 claims
- 1482US4680447ACooled optical window for semiconductor wafer heatingGENUS INC·Filed 1985·Granted Jul 14, 1987·43 cites·11 claims
- 1581US5486207AThermal pad for portable body heating/cooling system and method of useFiled 1994·Granted Jan 23, 1996·180 cites·22 claims
- 1679US8049351B2Turbine energy generating systemE NET LLC·Filed 2008·Granted Nov 1, 2011·8 cites·15 claims
- 1779US6310323B1Water cooled support for lamps and rapid thermal processing chamberMICRO C TECHNOLOGIES INC·Filed 2000·Granted Oct 30, 2001·24 cites·53 claims
- 1877US6965092B2Ultra fast rapid thermal processing chamber and method of useHITACHI INT ELECTRIC INC·Filed 2002·Granted Nov 15, 2005·20 cites·3 claims
- 1976US4834022ACVD reactor and gas injection systemFOCUS SEMICONDUCTOR SYSTEMS·Filed 1987·Granted May 30, 1989·34 cites·18 claims
- 2072US6617538B1Rotating arc plasma jet and method of use for chemical synthesis and chemical by-products abatementsFiled 2002·Granted Sep 9, 2003·25 cites·49 claims
- 2165US2024109029A1Exhaust gas abatement systemEDWARDS VACUUM LLC·Filed 2023·Application pending·0 cites
- 2258US2010072943A1Vehicle energy recovery systemENERGY RECOVERY TECHNOLOGY LLC·Filed 2009·Application pending·0 cites
- 2357US11931682B2Waste gas abatement technology for semiconductor processingEDWARDS VACUUM LLC·Filed 2021·Granted Mar 19, 2024·0 cites·13 claims
- 2456US2009057084A1Energy recovery systemENERGY RECOVERY TECHNOLOGY LLC·Filed 2008·Application pending·0 cites
- 2555US11786858B2Liquid filter apparatus for gas/solid separation for semiconductor processesEDWARDS VACUUM LLC·Filed 2020·Granted Oct 17, 2023·0 cites·14 claims
- 2655US2024347350A1In line water scrubber system for semiconductor processingEDWARDS VACUUM LLC·Filed 2022·Application pending·0 cites
- 2755US2008179154A1Energy recovery systemENERGY RECOVERY TECHNOLOGY LLC·Filed 2008·Application pending·0 cites
- 2854US6544339B1Rectilinear wedge geometry for optimal process control in chemical vapor deposition and rapid thermal processingMICRO C TECHNOLOGIES INC·Filed 2000·Granted Apr 8, 2003·1 cites·33 claims
- 2953US2019249863A1Steam generator and reactorQOLIBRI INC·Filed 2019·Application pending·0 cites
- 3051US2004129701A1Drinking vessel holder for use with a food serving utensilFiled 2003·Application pending·0 cites
- 3150US11705345B2Semiconductor system with steam generator and reactorEDWARDS VACUUM LLC·Filed 2020·Granted Jul 18, 2023·0 cites·15 claims
- 3249US4673799AFluidized bed heater for semiconductor processingFOCUS SEMICONDUCTOR SYSTEMS·Filed 1985·Granted Jun 16, 1987·10 cites·5 claims
- 3348US2010194116A1Turbine energy generating systemMAHAWILI IMAD·Filed 2010·Application pending·0 cites
- 3448US2012280503A1Exhaust energy recovery systemMAHAWILI IMAD·Filed 2012·Application pending·0 cites
- 3546US2009153099A1Method of electric energy transfer between a vehicle and a stationary collectorENERGY RECOVERY TECHNOLOGY LLC·Filed 2008·Application pending·0 cites
- 3646US2005023098A1Energy recovery systemFiled 2004·Application pending·0 cites
- 3746US2010215484A1Turbine energy generating systemMAHAWILI IMAD·Filed 2010·Application pending·0 cites
- 3845US2012085611A1Energy recovery systemMAHAWILI IMAD·Filed 2011·Application pending·0 cites
- 3942US2019282948A1Semiconductor processing systemMAHAWILI IMAD·Filed 2017·Application pending·0 cites
- 4042US2006289397A1Arc plasma jet and method of use for chemical scrubbing systemMAHAWILI IMAD·Filed 2006·Application pending·0 cites
- 4142US2007289793A1Energy recovery systemMAHAWILI IMAD·Filed 2006·Application pending·0 cites
- 4240US5336249APortable body heating/cooling system and method of useMAHAWILI IMAD·Filed 1992·Granted Aug 9, 1994·29 cites·11 claims
- 4340US2009179430A1Energy recovery systemENERGY RECOVERY TECHNOLOGY INC·Filed 2007·Application pending·0 cites
- 4440US2006187593A1Turbine energy generating systemMAHAWILI IMAD·Filed 2006·Application pending·0 cites
- 4539US2010295305A1Wind turbine and control systemE NET LLC·Filed 2010·Application pending·0 cites
- 4638US2008048817A1Circuit moduleENERGY RECOVERY TECHNOLOGY LLC·Filed 2007·Application pending·0 cites
- 4736US2016273557A1Fluid motion energy generationMAHAWILI IMAD·Filed 2015·Application pending·0 cites
- 4834US5591220AFluid replacement apparatus for use with a portable heating and cooling systemFiled 1995·Granted Jan 7, 1997·14 cites·12 claims
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