Inventor · disambiguated record
Peter A. Emmi
Also filed as: EMMI PETER · EMMI PETER A
6 granted patents·1 pending application·239 citations·filing 1999–2002
86Inventor score
Top patents by PatentIndex Score
7 records- 0186US6488778B1Apparatus and method for controlling wafer environment between thermal clean and thermal processingIBM·Filed 2000·Granted Dec 3, 2002·44 cites·52 claims
- 0286US6268621B1Vertical channel field effect transistorIBM·Filed 1999·Granted Jul 31, 2001·71 cites·7 claims
- 0386US6178660B1Pass-through semiconductor wafer processing tool and process for gas treating a moving semiconductor waferIBM·Filed 1999·Granted Jan 30, 2001·85 cites·24 claims
- 0478US6278147B1On-chip decoupling capacitor with bottom hardmaskIBM·Filed 2000·Granted Aug 21, 2001·19 cites·6 claims
- 0570US6758223B1Plasma RIE polymer removalINFINEON TECHNOLOGIES AG·Filed 2000·Granted Jul 6, 2004·12 cites·7 claims
- 0664US6387754B2Method of forming an on-chip decoupling capacitor with bottom hardmaskIBM·Filed 2001·Granted May 14, 2002·8 cites·14 claims
- 0740US2002088476A1Plasma RIE polymer removalINFINEON TECHNOLOGIES CORP·Filed 2002·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →