Inventor · disambiguated record
Katsuyuki Itoh
Also filed as: ITOH KATSUYUKI
13 granted patents·104 citations·filing 1983–2010
90Inventor score
Top patents by PatentIndex Score
13 records- 0168US5438207AElectron beam direct writing system for ULSI lithography with facilitated rotation and gain corrections of shot patterns and electron beam direct writing method for sameNEC CORP·Filed 1994·Granted Aug 1, 1995·20 cites·7 claims
- 0265US7251802B2Method and system for deciding a wiring routeHITACHI LTD·Filed 2005·Granted Jul 31, 2007·5 cites·8 claims
- 0363US6640332B2Wiring pattern decision method considering electrical length and multi-layer wiring boardHITACHI LTD·Filed 2001·Granted Oct 28, 2003·11 cites·10 claims
- 0462US5557110AAperture for use in electron beam system for pattern writingNEC CORP·Filed 1995·Granted Sep 17, 1996·28 cites·6 claims
- 0557US5994036AMethod of forming a resist patternNEC CORP·Filed 1997·Granted Nov 30, 1999·18 cites·7 claims
- 0649US7735040B2Method for designing cell layout of a semiconductor integrated circuit with logic having a data flowHITACHI LTD·Filed 2007·Granted Jun 8, 2010·0 cites·6 claims
- 0741US5593761AElectron beam shaping mask for an electron beam system with pattern writing capabilityNEC CORP·Filed 1995·Granted Jan 14, 1997·8 cites·20 claims
- 0839US8230381B2Method for designing cell layout of semiconductor integrated circuitITOH KATSUYUKI·Filed 2010·Granted Jul 24, 2012·0 cites·1 claims
- 0935US6627357B2ReticleNEC ELECTRONICS CORP·Filed 2001·Granted Sep 30, 2003·0 cites·18 claims
- 1035US6296925B1Aperture for charged beam drawing machine and method for forming the sameNEC CORP·Filed 1997·Granted Oct 2, 2001·4 cites·8 claims
- 1134US6288407B1Electron beam-writing apparatus and electron beam-writing methodNEC CORP·Filed 1997·Granted Sep 11, 2001·5 cites·6 claims
- 1234US4545670ADeveloping apparatus using magnetic developerOKI ELECTRIC IND CO LTD·Filed 1983·Granted Oct 8, 1985·4 cites·8 claims
- 1329US5784150AElectron-beam cell projection lithography systemNEC CORP·Filed 1996·Granted Jul 21, 1998·1 cites·11 claims
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