Inventor · disambiguated record
Paul M. Schaible
Also filed as: SCHAIBLE PAUL M
6 granted patents·750 citations·filing 1975–1985
88Inventor score
Files withIBM6
Top patents by PatentIndex Score
6 records- 0197US4944836AChem-mech polishing method for producing coplanar metal/insulator films on a substrateIBM·Filed 1985·Granted Jul 31, 1990·539 cites·11 claims
- 0292US3994793AReactive ion etching of aluminumIBM·Filed 1975·Granted Nov 30, 1976·86 cites·9 claims
- 0384US4352716ADry etching of copper patternsIBM·Filed 1980·Granted Oct 5, 1982·39 cites·34 claims
- 0471US4132586ASelective dry etching of substratesIBM·Filed 1977·Granted Jan 2, 1979·26 cites·16 claims
- 0570US4396458AMethod for forming planar metal/insulator structuresIBM·Filed 1981·Granted Aug 2, 1983·34 cites·32 claims
- 0667US4430365AMethod for forming conductive lines and viasIBM·Filed 1982·Granted Feb 7, 1984·26 cites·4 claims
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