Inventor · disambiguated record
Robert C. Abbe
Also filed as: ABBE ROBERT C · ABBE ROBERT CLEVELAND
13 granted patents·738 citations·filing 1974–2004
94Inventor score
Top patents by PatentIndex Score
13 records- 0195US4457664AWafer alignment stationADE CORP·Filed 1982·Granted Jul 3, 1984·133 cites·23 claims
- 0293US5511005AWafer handling and processing systemADE CORP·Filed 1994·Granted Apr 23, 1996·249 cites·31 claims
- 0391US4897015ARotary to linear motion robot armADE CORP·Filed 1987·Granted Jan 30, 1990·136 cites·11 claims
- 0491US3990005ACapacitive thickness gauging for ungrounded elementsADE CORP·Filed 1974·Granted Nov 2, 1976·46 cites·25 claims
- 0584US4158171AWafer edge detection systemADE CORP·Filed 1977·Granted Jun 12, 1979·33 cites·16 claims
- 0679US4217542ASelf inverting gauging systemADE CORP·Filed 1978·Granted Aug 12, 1980·26 cites·17 claims
- 0775US4860229AWafer flatness stationADE CORP·Filed 1988·Granted Aug 22, 1989·42 cites·21 claims
- 0870US7184149B2Methods and apparatus for reducing error in interferometric imaging measurementsDIMENSIONAL PHOTONICS INTERNAT·Filed 2004·Granted Feb 27, 2007·12 cites·4 claims
- 0969US4849916AImproved spatial resolution measurement system and methodADE CORP·Filed 1985·Granted Jul 18, 1989·24 cites·27 claims
- 1054US4910453AMulti-probe grouping system with nonlinear error correctionADE CORP·Filed 1987·Granted Mar 20, 1990·14 cites·11 claims
- 1147US4353029ASelf inverting gauging systemADE CORP·Filed 1980·Granted Oct 5, 1982·9 cites·6 claims
- 1245US4228392ASecond order correction in linearized proximity probeADE CORP·Filed 1977·Granted Oct 14, 1980·6 cites·18 claims
- 1338US6255664B1Sensor for measuring degree of flatnessSUPER SILICON CRYSTAL RES INST·Filed 1999·Granted Jul 3, 2001·8 cites·6 claims
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