Inventor · disambiguated record
Quirin W. Matthys
Also filed as: MATTHYS QUIRIN W
2 granted patents·49 citations·filing 2002–2004
63Inventor score
Technology areasH10P
Files withFSI INT INC2
Top patents by PatentIndex Score
2 records- 0186US6979165B2Reduced footprint tool for automated processing of microelectronic substratesFSI INT INC·Filed 2002·Granted Dec 27, 2005·44 cites·18 claims
- 0254US7134827B2Reduced footprint tool for automated processing of microelectronic substratesFSI INT INC·Filed 2004·Granted Nov 14, 2006·5 cites·20 claims
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