Inventor · disambiguated record
Todd Maciej
Also filed as: MACIEJ TODD · MACIEJ TODD K
6 granted patents·125 citations·filing 1996–2019
84Inventor score
Top patents by PatentIndex Score
6 records- 0186US6979165B2Reduced footprint tool for automated processing of microelectronic substratesFSI INT INC·Filed 2002·Granted Dec 27, 2005·44 cites·18 claims
- 0276US11545387B2Magnetic integrated lift pin system for a chemical processing chamberTEL FSI INC·Filed 2019·Granted Jan 3, 2023·2 cites·17 claims
- 0361US5820692AVacuum compatible water vapor and rinse process moduleFSI INTERNTIONAL·Filed 1996·Granted Oct 13, 1998·41 cites·21 claims
- 0460US6135156ATubing closureFLUOROWARE INC·Filed 1999·Granted Oct 24, 2000·26 cites·15 claims
- 0559US6845779B2Edge gripping device for handling a set of semiconductor wafers in an immersion processing systemFSI INT INC·Filed 2002·Granted Jan 25, 2005·7 cites·26 claims
- 0654US7134827B2Reduced footprint tool for automated processing of microelectronic substratesFSI INT INC·Filed 2004·Granted Nov 14, 2006·5 cites·20 claims
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