Inventor · disambiguated record
Stephen Yu-Hong Lau
Also filed as: LAU STEPHEN · LAU STEPHEN YU-HONG
18 granted patents·2 pending applications·242 citations·filing 2007–2019
95Inventor score
Top patents by PatentIndex Score
20 records- 0196US10221484B2Temperature controlled showerheadNOVELLUS SYSTEMS INC·Filed 2016·Granted Mar 5, 2019·9 cites·20 claims
- 0296US9476120B2Temperature controlled showerheadNOVELLUS SYSTEMS INC·Filed 2014·Granted Oct 25, 2016·17 cites·20 claims
- 0396US8734663B2Purging of porogen from UV cure chamberNOVELLUS SYSTEMS INC·Filed 2013·Granted May 27, 2014·19 cites·10 claims
- 0496US8282768B1Purging of porogen from UV cure chamberSMARGIASSI EUGENE·Filed 2009·Granted Oct 9, 2012·38 cites·20 claims
- 0595US10584415B2Temperature controlled showerheadNOVELLUS SYSTEMS INC·Filed 2019·Granted Mar 10, 2020·5 cites·20 claims
- 0695US8137467B2Temperature controlled showerheadMEINHOLD HENNER·Filed 2007·Granted Mar 20, 2012·60 cites·27 claims
- 0794US8673080B2Temperature controlled showerheadMEINHOLD HENNER·Filed 2008·Granted Mar 18, 2014·36 cites·18 claims
- 0894US8518210B2Purging of porogen from UV cure chamberSMARGIASSI EUGENE·Filed 2012·Granted Aug 27, 2013·16 cites·18 claims
- 0991US10121682B2Purging of porogen from UV cure chamberNOVELLUS SYSTEMS INC·Filed 2016·Granted Nov 6, 2018·5 cites·10 claims
- 1091US9384959B2Purging of porogen from UV cure chamberNOVELLUS SYSTEMS INC·Filed 2014·Granted Jul 5, 2016·7 cites·9 claims
- 1189US9073100B2Method and apparatuses for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2013·Granted Jul 7, 2015·8 cites·23 claims
- 1288US9028765B2Exhaust flow spreading baffle-riser to optimize remote plasma window cleanLAM RES CORP·Filed 2013·Granted May 12, 2015·9 cites·20 claims
- 1387US10354857B2High power low pressure UV bulb with plasma resistant coatingLAM RES CORP·Filed 2016·Granted Jul 16, 2019·6 cites·18 claims
- 1481US10020197B2Method for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2015·Granted Jul 10, 2018·2 cites·20 claims
- 1573US8925588B2Flow balancing in gas distribution networksNOVELLUS SYSTEMS INC·Filed 2012·Granted Jan 6, 2015·3 cites·27 claims
- 1667US9268340B2Flow balancing in gas distribution networksNOVELLUS SYSTEMS INC·Filed 2014·Granted Feb 23, 2016·2 cites·35 claims
- 1761US11177131B2Method and apparatuses for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2018·Granted Nov 16, 2021·0 cites·20 claims
- 1854US2009095218A1Temperature controlled showerheadNOVELLUS SYSTEMS INC·Filed 2007·Application pending·0 cites
- 1941US2015072538A1Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layerLAM RES CORP·Filed 2013·Application pending·0 cites
- 2036US10240236B2Clean resistant windows for ultraviolet thermal processingLAM RES CORP·Filed 2015·Granted Mar 26, 2019·0 cites·20 claims
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