Inventor · disambiguated record
Frederick T. Turner
Also filed as: TURNER FREDERICK · TURNER FREDERICK T
13 granted patents·1 pending application·1,301 citations·filing 1978–2005
95Inventor score
Top patents by PatentIndex Score
14 records- 0196US4917556AModular wafer transport and processing systemVARIAN ASSOCIATES·Filed 1989·Granted Apr 17, 1990·786 cites·9 claims
- 0296US4313815ASputter-coating system, and vaccuum valve, transport, and sputter source array arrangements thereforVARIAN ASSOCIATES·Filed 1978·Granted Feb 2, 1982·102 cites·9 claims
- 0396US4166783ADeposition rate regulation by computer control of sputtering systemsVARIAN ASSOCIATES·Filed 1978·Granted Sep 4, 1979·58 cites·7 claims
- 0493US7001491B2Vacuum-processing chamber-shield and multi-chamber pumping methodTOKYO ELECTRON LTD·Filed 2003·Granted Feb 21, 2006·45 cites·16 claims
- 0584US5513594AClamp with wafer release for semiconductor wafer processing equipmentFiled 1993·Granted May 7, 1996·90 cites·11 claims
- 0684US4756815AWafer coating systemVARIAN ASSOCIATES·Filed 1979·Granted Jul 12, 1988·46 cites·22 claims
- 0782US4436602ABlocking shield and method for contouring the thickness of sputter coated layersVARIAN ASSOCIATES·Filed 1983·Granted Mar 13, 1984·23 cites·10 claims
- 0874US4416759ASputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layersVARIAN ASSOCIATES·Filed 1981·Granted Nov 22, 1983·27 cites·6 claims
- 0972US5281320AWafer coating systemVARIAN ASSOCIATES·Filed 1991·Granted Jan 25, 1994·46 cites·7 claims
- 1067US5605866AClamp with wafer release for semiconductor wafer processing equipmentVARIAN ASSOCIATES·Filed 1995·Granted Feb 25, 1997·30 cites·4 claims
- 1165US5024747AWafer coating systemVARIAN ASSOCIATES·Filed 1988·Granted Jun 18, 1991·27 cites·17 claims
- 1258US4416760AApparatus for asymmetrically contouring the thickness of sputter coated layersVARIAN ASSOCIATES·Filed 1981·Granted Nov 22, 1983·14 cites·6 claims
- 1354US4392938ARadio frequency etch table with biased extension memberVARIAN ASSOCIATES·Filed 1981·Granted Jul 12, 1983·7 cites·11 claims
- 1445US2006037537A1Vacuum-processing chamber-shield and multi-chamber pumping methodTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
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