Inventor · disambiguated record
Toshiaki Koguchi
Also filed as: KOGUCHI TOSHIAKI
3 granted patents·47 citations·filing 2001–2006
70Inventor score
Top patents by PatentIndex Score
3 records- 0186US6432261B2Plasma etching systemANELVA CORP·Filed 2001·Granted Aug 13, 2002·34 cites·4 claims
- 0269US7182122B2Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatusANELVA CORP·Filed 2001·Granted Feb 27, 2007·12 cites·12 claims
- 0361US7886808B2Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatusCANON ANELVA CORP·Filed 2006·Granted Feb 15, 2011·1 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →