Inventor · disambiguated record
Murat Bozkurt
Also filed as: BOZKURT MURAT
13 granted patents·3 pending applications·29 citations·filing 2015–2022
88Inventor score
Top patents by PatentIndex Score
16 records- 0196US10437163B2Method and apparatus for design of a metrology targetASML NETHERLANDS BV·Filed 2017·Granted Oct 8, 2019·7 cites·9 claims
- 0294US11385553B2Metrology method, patterning device, apparatus and computer programASML NETHERLANDS BV·Filed 2021·Granted Jul 12, 2022·2 cites·20 claims
- 0394US10481506B2Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Nov 19, 2019·7 cites·24 claims
- 0488US10859923B2Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Dec 8, 2020·2 cites·12 claims
- 0586US10996570B2Metrology method, patterning device, apparatus and computer programASML NETHERLANDS BV·Filed 2019·Granted May 4, 2021·2 cites·25 claims
- 0684US9940703B2Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 10, 2018·4 cites·18 claims
- 0776US9633427B2Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Apr 25, 2017·2 cites·20 claims
- 0872US11698346B2Methods and apparatus for monitoring a manufacturing process, inspection apparatus, lithographic system, device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 11, 2023·2 cites·20 claims
- 0972US10564552B2Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Feb 18, 2020·1 cites·20 claims
- 1067US11003099B2Method and apparatus for design of a metrology targetASML NETHERLANDS BV·Filed 2019·Granted May 11, 2021·0 cites·20 claims
- 1166US2020050114A1Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 1254US10794693B2Metrology method, apparatus and computer programASML NETHERLANDS BV·Filed 2018·Granted Oct 6, 2020·0 cites·12 claims
- 1342US2022323923A1Microcapsule and production method thereofASIK MEHMET DOGAN·Filed 2022·Application pending·0 cites
- 1440US10705437B2Metrology method and apparatus, computer program and lithographic systemASML NETHERLANDS BV·Filed 2018·Granted Jul 7, 2020·0 cites·15 claims
- 1528US11318104B2Microcapsule and production method thereofASIK MEHMET DOGAN·Filed 2017·Granted May 3, 2022·0 cites·8 claims
- 1626US2019381211A1Method of forming a structure with extracellular matrix properties in the body using targeted microcapsulesASIK MEHMET DOGAN·Filed 2017·Application pending·0 cites
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