Inventor · disambiguated record
Edward K. Pavelchek
Also filed as: PAVELCHEK EDWARD K
20 granted patents·2 pending applications·1,003 citations·filing 1992–2008
97Inventor score
Top patents by PatentIndex Score
22 records- 0197US5939236AAntireflective coating compositions comprising photoacid generatorsSHIPLEY CO LLC·Filed 1997·Granted Aug 17, 1999·222 cites·29 claims
- 0295US6767689B2Antireflective coating compositionsSHIPLEY CO LLC·Filed 2002·Granted Jul 27, 2004·57 cites·38 claims
- 0395US6653049B2High conformality antireflective coating compositionsSHIPLEY CO LLC·Filed 2001·Granted Nov 25, 2003·63 cites·30 claims
- 0494US6316165B1Planarizing antireflective coating compositionsSHIPLEY CO LLC·Filed 1999·Granted Nov 13, 2001·105 cites·18 claims
- 0593US6410209B1Methods utilizing antireflective coating compositions with exposure under 200 nmSHIPLEY CO LLC·Filed 1998·Granted Jun 25, 2002·108 cites·9 claims
- 0692US7632630B2Dyed photoresists and methods and articles of manufacture comprising sameROHM & HAAS ELECT MAT·Filed 2006·Granted Dec 15, 2009·17 cites·12 claims
- 0792US6602652B2Antireflective coating compositions and exposure methods under 200 nmSHIPLEY CO LLC·Filed 2002·Granted Aug 5, 2003·44 cites·19 claims
- 0892US6261743B1Antireflective coating compositions comprising photoacid generatorsSHIPLEY CO LLC·Filed 1998·Granted Jul 17, 2001·107 cites·24 claims
- 0988US6855466B2Planarizing antireflective coating compositionsSHIPLEY CO LLC·Filed 2001·Granted Feb 15, 2005·27 cites·18 claims
- 1086US6190839B1High conformality antireflective coating compositionsSHIPLEY CO LLC·Filed 1998·Granted Feb 20, 2001·54 cites·15 claims
- 1185US6887648B2Antireflective coating compositionsSHIPLEY CO LLC·Filed 2004·Granted May 3, 2005·44 cites·7 claims
- 1284US6890448B2Antireflective hard mask compositionsSHIPLEY CO LLC·Filed 1999·Granted May 10, 2005·45 cites·8 claims
- 1384US6849373B2Antireflective coating compositions comprising photoacid generatorsFiled 2001·Granted Feb 1, 2005·23 cites·10 claims
- 1484US6461717B1Aperture fillSHIPLEY CO LLC·Filed 2000·Granted Oct 8, 2002·27 cites·16 claims
- 1579US8142988B2Coating compositions for use with an overcoated photoresistZAMPINI ANTHONY·Filed 2006·Granted Mar 27, 2012·5 cites·10 claims
- 1675US6749765B2Aperture fillSHIPLEY CO LLC·Filed 2002·Granted Jun 15, 2004·15 cites·13 claims
- 1769US7018717B2Antireflective hard mask compositionsSHIPLEY CO LLC·Filed 2003·Granted Mar 28, 2006·8 cites·10 claims
- 1868US5366852AMethods for treating photoresistsSHIPLEY CO·Filed 1992·Granted Nov 22, 1994·26 cites·3 claims
- 1944US2006275696A1Coating compositions for use with an overcoated photoresistROHM & HAAS ELECT MAT·Filed 2006·Application pending·0 cites
- 2042US7026101B2Antireflective coating compositionsSHIPLEY CO LLC·Filed 2001·Granted Apr 11, 2006·4 cites·35 claims
- 2135US2009220888A1Dyed photoresists and methods and articles of manufacture comprising sameSHIPLEY CO LLC·Filed 2008·Application pending·0 cites
- 2233US7147983B1Dyed photoresists and methods and articles of manufacture comprising sameSHIPLEY CO LLC·Filed 1996·Granted Dec 12, 2006·2 cites·4 claims
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