Inventor · disambiguated record
Paul Frank Luehrmann
Also filed as: LUEHRMANN PAUL FRANK
13 granted patents·205 citations·filing 2003–2021
92Inventor score
Technology areasG03F
Top patents by PatentIndex Score
13 records- 0198US8760662B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2013·Granted Jun 24, 2014·16 cites·7 claims
- 0298US7791732B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2005·Granted Sep 7, 2010·80 cites·15 claims
- 0397US8054467B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2010·Granted Nov 8, 2011·15 cites·13 claims
- 0496US7112813B2Device inspection method and apparatus using an asymmetric markerASML NETHERLANDS BV·Filed 2003·Granted Sep 26, 2006·61 cites·64 claims
- 0593US8553230B2Method and apparatus for angular-resolved spectroscopic lithography characterizationDEN BOEF ARIE JEFFREY MARIA·Filed 2011·Granted Oct 8, 2013·10 cites·8 claims
- 0692US10955353B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2019·Granted Mar 23, 2021·2 cites·7 claims
- 0790US10241055B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2014·Granted Mar 26, 2019·3 cites·11 claims
- 0880US9715181B2Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program productASML NETHERLANDS BV·Filed 2013·Granted Jul 25, 2017·3 cites·20 claims
- 0978US11525786B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2021·Granted Dec 13, 2022·0 cites·4 claims
- 1078US7679715B2Lithographic processing cell, lithographic apparatus, track and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Mar 16, 2010·4 cites·22 claims
- 1175US9971251B2Lithography system and a machine learning controller for such a lithography systemASML NETHERLANDS BV·Filed 2014·Granted May 15, 2018·2 cites·21 claims
- 1274US9507279B2Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program productASML NETHERLANDS BV·Filed 2013·Granted Nov 29, 2016·2 cites·9 claims
- 1366US7403259B2Lithographic processing cell, lithographic apparatus, track and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 22, 2008·7 cites·24 claims
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