Inventor · disambiguated record
Hideo Niko
Also filed as: NIKO HIDEO · NIKOU HIDEO
4 granted patents·16 citations·filing 2001–2006
73Inventor score
Technology areasH01J
Files withMATSUSHITA ELECTRIC INDUSTRIAL CO LTD4
Top patents by PatentIndex Score
4 records- 0180US7402527B2Dry etching method, fabrication method for semiconductor device, and dry etching apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2006·Granted Jul 22, 2008·4 cites·2 claims
- 0274US6762129B2Dry etching method, fabrication method for semiconductor device, and dry etching apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2001·Granted Jul 13, 2004·8 cites·6 claims
- 0373US7341922B2Dry etching method, fabrication method for semiconductor device, and dry etching apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2006·Granted Mar 11, 2008·2 cites·7 claims
- 0457US7148151B2Dry etching method, fabrication method for semiconductor device, and dry etching apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Granted Dec 12, 2006·2 cites·5 claims
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