Inventor · disambiguated record
En-Tien Tan
Also filed as: TAN EN-TIEN
4 granted patents·1 pending application·39 citations·filing 1996–2000
74Inventor score
Files withUNITED MICROELECTRONICS CORP4
Top patents by PatentIndex Score
5 records- 0159US6062442ADispense system of a photoresist coating machineUNITED MICROELECTRONICS CORP·Filed 1998·Granted May 16, 2000·25 cites·20 claims
- 0237US6099646ADispensing system of a coaterUNITED MICROELECTRONICS CORP·Filed 1998·Granted Aug 8, 2000·6 cites·11 claims
- 0329US6048399ASOG coater nozzle potUNITED MICROELECTRONICS CORP·Filed 1998·Granted Apr 11, 2000·2 cites·13 claims
- 0427US5740580AStepper vacuum chuck wiperUNITED MICROELECTRONICS CORP·Filed 1996·Granted Apr 21, 1998·6 cites·8 claims
- 0524US2002056413A1Chemical solution coating apparatusFiled 2000·Application pending·0 cites
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