Inventor · disambiguated record
Masanori Obata
Also filed as: OBATA MASANORI
5 granted patents·383 citations·filing 1986–1997
86Inventor score
Top patents by PatentIndex Score
5 records- 0190US4913090AChemical vapor deposition apparatus having cooling heads adjacent to gas dispersing heads in a single chamberMITSUBISHI ELECTRIC CORP·Filed 1988·Granted Apr 3, 1990·77 cites·5 claims
- 0286US5321634AAutomatic thin-film measuring apparatusMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Jun 14, 1994·91 cites·7 claims
- 0379US6072876AMethod and system for depositing private key used in RSA cryptosystemNIPPON TELEGRAPH & TELEPHONE·Filed 1997·Granted Jun 6, 2000·127 cites·30 claims
- 0479US4731516ALaser polishing semiconductor waferMITSUBISHI ELECTRIC CORP·Filed 1986·Granted Mar 15, 1988·56 cites·5 claims
- 0558US5306947ASemiconductor device and manufacturing method thereofMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Apr 26, 1994·32 cites·7 claims
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