Inventor · disambiguated record
Daniel J. Syverson
Also filed as: SYVERSON DANIEL J
6 granted patents·723 citations·filing 1988–1996
88Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0196US4900395AHF gas etching of wafers in an acid processorFSI INT INC·Filed 1989·Granted Feb 13, 1990·332 cites·26 claims
- 0289US5169408AApparatus for wafer processing with in situ rinseFSI INT INC·Filed 1990·Granted Dec 8, 1992·201 cites·14 claims
- 0384US4857142AMethod and apparatus for controlling simultaneous etching of front and back sides of wafersFSI INT INC·Filed 1988·Granted Aug 15, 1989·72 cites·18 claims
- 0482US5348619AMetal selective polymer removalTEXAS INSTRUMENTS INC·Filed 1992·Granted Sep 20, 1994·77 cites·14 claims
- 0566US5458724AEtch chamber with gas dispersing membraneFSI INT INC·Filed 1989·Granted Oct 17, 1995·37 cites·12 claims
- 0632USRE36006EMetal selective polymer removalTEXAS INSTRUMENTS INC·Filed 1996·Granted Dec 22, 1998·4 cites·15 claims
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