Inventor · disambiguated record
Yasri Yudhistira
Also filed as: YUDHISTIRA YASRI
4 granted patents·2 pending applications·14 citations·filing 2006–2022
65Inventor score
Top patents by PatentIndex Score
6 records- 0184US7537870B2Lithography process optimization and systemCHARTERED SEMICONDUCTOR MFG·Filed 2006·Granted May 26, 2009·12 cites·20 claims
- 0265US7622403B2Semiconductor processing system with ultra low-K dielectricCHARTERED SEMICONDUCTOR MFG·Filed 2006·Granted Nov 24, 2009·2 cites·10 claims
- 0353US2024152059A1A method for modeling measurement data over a substrate area and associated apparatusesASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0448US11403453B2Defect predictionASML NETHERLANDS BV·Filed 2018·Granted Aug 2, 2022·0 cites·20 claims
- 0545US11054754B2Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 6, 2021·0 cites·17 claims
- 0634US2014019927A1Waferless measurement recipeKOO CHEE KIONG·Filed 2012·Application pending·0 cites
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