Inventor · disambiguated record
Wolfgang Vollrath
Also filed as: VOLLRATH WOLFGANG
7 granted patents·6 pending applications·64 citations·filing 1993–2015
84Inventor score
Files withVISTEC SEMICONDUCTOR SYS GMBH6LEICA MICROSYSTEMS2BIRKNER ANDREAS1HAHN KURT1HEIDEN MICHAEL1
Top patents by PatentIndex Score
13 records- 0191US9645097B2In-line wafer edge inspection, wafer pre-alignment, and wafer cleaningKLA TENCOR CORP·Filed 2015·Granted May 9, 2017·10 cites·21 claims
- 0282US8089622B2Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafersBIRKNER ANDREAS·Filed 2008·Granted Jan 3, 2012·13 cites·20 claims
- 0378US6624930B1Illumination device for a DUV microscope and DUV microscopeLEICA MICROSYSTEMS·Filed 2000·Granted Sep 23, 2003·24 cites·29 claims
- 0477US7268867B2Apparatus and method for inspecting a semiconductor componentVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Granted Sep 11, 2007·6 cites·18 claims
- 0574US8451440B2Apparatus for the optical inspection of wafersHAHN KURT·Filed 2010·Granted May 28, 2013·4 cites·35 claims
- 0647US2008144025A1Apparatus for wafer inspectionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Application pending·0 cites
- 0747US2008144014A1Apparatus for wafer inspectionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Application pending·0 cites
- 0846US2009279080A1Device and method for the inspection of defects on the edge region of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2009·Application pending·0 cites
- 0945US2009034832A1Device and method for scanning the whole surface of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
- 1039US2009225414A1Dark Field Objective for a MicroscopeHEIDEN MICHAEL·Filed 2006·Application pending·0 cites
- 1135US5440422AMethod for manufacturing ultraviolet microscope dry objectives and microscope objectives manufactured in accordance with this methodLEICA MIKROSKOPIE & SYST·Filed 1993·Granted Aug 8, 1995·7 cites·8 claims
- 1234US2008062510A1Method for Selecting a Wavelength, and a MicroscopeVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Application pending·0 cites
- 1330US7375792B2Apparatus for measuring feature widths on masks for the semiconductor industryLEICA MICROSYSTEMS·Filed 2004·Granted May 20, 2008·0 cites·22 claims
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