Inventor · disambiguated record
Arnon Gat
Also filed as: GAT ARNON
21 granted patents·1,117 citations·filing 1978–2009
97Inventor score
Files withMATTSON TECH INC9ASSOCIATES AG3GAT ARNON3PROCESSING TECHNOLOGIES INC AG2MATTSON TECHNOLOGIES INC1
Top patents by PatentIndex Score
21 records- 0194US7226488B2Fast heating and cooling apparatus for semiconductor wafersMATTSON TECH INC·Filed 2005·Granted Jun 5, 2007·21 cites·22 claims
- 0293US6727474B2Rapid thermal processing chamber for processing multiple wafersMATTSON TECH INC·Filed 2001·Granted Apr 27, 2004·58 cites·40 claims
- 0393US6717158B1Heating device for heating semiconductor wafers in thermal processing chambersMATTSON TECH INC·Filed 2000·Granted Apr 6, 2004·74 cites·15 claims
- 0492US6610967B2Rapid thermal processing chamber for processing multiple wafersMATTSON TECH INC·Filed 2001·Granted Aug 26, 2003·51 cites·17 claims
- 0592US6403923B1System for controlling the temperature of a reflective substrate during rapid heatingMATTSON TECH INC·Filed 2000·Granted Jun 11, 2002·66 cites·20 claims
- 0691US8138451B2Heating device for heating semiconductor wafers in thermal processing chambersGAT ARNON·Filed 2009·Granted Mar 20, 2012·15 cites·27 claims
- 0791US4214918AMethod of forming polycrystalline semiconductor interconnections, resistors and contacts by applying radiation beamSTANFORD LELAND JUNIOR UNIV TR·Filed 1978·Granted Jul 29, 1980·65 cites·16 claims
- 0890US7608802B2Heating device for heating semiconductor wafers in thermal processing chambersMATTSON TECH INC·Filed 2006·Granted Oct 27, 2009·12 cites·48 claims
- 0990US4331485AMethod for heat treating semiconductor material using high intensity CW lampsGAT ARNON·Filed 1980·Granted May 25, 1982·85 cites·6 claims
- 1088US5960158AApparatus and method for filtering light in a thermal processing chamberASSOCIATES AG·Filed 1997·Granted Sep 28, 1999·117 cites·30 claims
- 1186US6310328B1Rapid thermal processing chamber for processing multiple wafersMATTSON TECHNOLOGIES INC·Filed 1998·Granted Oct 30, 2001·75 cites·11 claims
- 1285US5970214AHeating device for semiconductor wafersASSOCIATES AG·Filed 1998·Granted Oct 19, 1999·75 cites·26 claims
- 1384US4356384AMethod and means for heat treating semiconductor material using high intensity CW lampsGAT ARNON·Filed 1981·Granted Oct 26, 1982·56 cites·8 claims
- 1483US6359263B2System for controlling the temperature of a reflective substrate during rapid heatingSTEAG RTP SYSTEMS INC·Filed 1999·Granted Mar 19, 2002·69 cites·15 claims
- 1582US7038174B2Heating device for heating semiconductor wafers in thermal processing chambersMATTSON TECH INC·Filed 2004·Granted May 2, 2006·19 cites·24 claims
- 1682US5874711AApparatus and method for determining the temperature of a radiating surfaceASSOCIATES AG·Filed 1997·Granted Feb 23, 1999·87 cites·29 claims
- 1779US5114242ABichannel radiation detection methodPROCESSING TECHNOLOGIES INC AG·Filed 1990·Granted May 19, 1992·54 cites·9 claims
- 1878US4233671ARead only memory and integrated circuit and method of programming by laser meansUNIV STANFORD·Filed 1979·Granted Nov 11, 1980·32 cites·25 claims
- 1976US6771895B2Heating device for heating semiconductor wafers in thermal processing chambersMATTSON TECH INC·Filed 1999·Granted Aug 3, 2004·35 cites·40 claims
- 2073US6919271B2Method for rapidly heating and cooling semiconductor wafersMATTSON TECH INC·Filed 2003·Granted Jul 19, 2005·13 cites·23 claims
- 2171US5165796ABichannel radiation detection apparatusPROCESSING TECHNOLOGIES INC AG·Filed 1990·Granted Nov 24, 1992·38 cites·6 claims
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