Inventor · disambiguated record
Johannes Bihr
Also filed as: BIHR JOHANNES
8 granted patents·95 citations·filing 1991–2010
86Inventor score
Technology areasH01J
Files withZEISS CARL NTS GMBH3ZEISS STIFTUNG2ALIS CORP1BIHR JOHANNES1LEO ELEKTRONENMIKROSKOPIE GMBH1
Top patents by PatentIndex Score
8 records- 0193US7521693B2Ion sources, systems and methodsALIS CORP·Filed 2006·Granted Apr 21, 2009·23 cites·107 claims
- 0286US7645989B2Electron microscope for inspecting and processing of an object with miniaturized structures and method thereofZEISS CARL NTS GMBH·Filed 2007·Granted Jan 12, 2010·13 cites·19 claims
- 0371US6239430B1Particle beam apparatus with energy filterLEO ELEKTRONENMIKROSKOPIE GMBH·Filed 1998·Granted May 29, 2001·24 cites·15 claims
- 0469US7285780B2Detector system for a scanning electron microscope and a scanning electron microscope incorporating said detector systemZEISS CARL NTS GMBH·Filed 2006·Granted Oct 23, 2007·4 cites·31 claims
- 0566US5177361AElectron energy filterZEISS STIFTUNG·Filed 1991·Granted Jan 5, 1993·25 cites·16 claims
- 0658US7060978B2Detector system for a particle beam apparatus, and particle beam apparatus with such a detector systemZEISS CARL NTS GMBH·Filed 2001·Granted Jun 13, 2006·4 cites·20 claims
- 0754US8058614B2Electron microscope for inspecting and processing of an object with miniaturized structures and method thereofBIHR JOHANNES·Filed 2010·Granted Nov 15, 2011·1 cites·14 claims
- 0826US5134339AHigh-voltage lead-through for particle-beam apparatusZEISS STIFTUNG·Filed 1991·Granted Jul 28, 1992·1 cites·11 claims
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