Inventor · disambiguated record
Akiyoshi Suzuki
Also filed as: SUZUKI AKIYOSHI
119 granted patents·13 pending applications·4,044 citations·filing 1974–2025
99Inventor score
Top patents by PatentIndex Score
132 records- 0197US5305054AImaging method for manufacture of microdevicesCANON KK·Filed 1992·Granted Apr 19, 1994·124 cites·59 claims
- 0297US5153773AIllumination device including amplitude-division and beam movementsCANON KK·Filed 1990·Granted Oct 6, 1992·214 cites·23 claims
- 0397US4814829AProjection exposure apparatusCANON KK·Filed 1987·Granted Mar 21, 1989·162 cites·43 claims
- 0496US5463497AIllumination device including an optical integrator defining a plurality of secondary light sources and related methodCANON KK·Filed 1994·Granted Oct 31, 1995·166 cites·38 claims
- 0595US5789734AExposure apparatus that compensates for spherical aberration of an image forming deviceCANON KK·Filed 1994·Granted Aug 4, 1998·103 cites·6 claims
- 0694US12109648B2Laser annealing apparatus and method for manufacturing electronic deviceGIGAPHOTON INC·Filed 2021·Granted Oct 8, 2024·2 cites·20 claims
- 0794US4062623ADevice for observing an objectCANON KK·Filed 1976·Granted Dec 13, 1977·68 cites·6 claims
- 0893US7126667B2Exposure apparatus and methodCANON KK·Filed 2006·Granted Oct 24, 2006·17 cites·1 claims
- 0993US7107573B2Method for setting mask pattern and illumination conditionCANON KK·Filed 2002·Granted Sep 12, 2006·48 cites·19 claims
- 1093US5105075AProjection exposure apparatusCANON KK·Filed 1991·Granted Apr 14, 1992·121 cites·23 claims
- 1193US4653903AExposure apparatusCANON KK·Filed 1985·Granted Mar 31, 1987·76 cites·11 claims
- 1292US5148214AAlignment and exposure apparatusCANON KK·Filed 1991·Granted Sep 15, 1992·80 cites·34 claims
- 1392US5118957AMethod and apparatus for precisely detecting surface position of a patterned waferCANON KK·Filed 1991·Granted Jun 2, 1992·77 cites·55 claims
- 1491US7217503B2Exposure method and apparatusCANON KK·Filed 2002·Granted May 15, 2007·41 cites·19 claims
- 1591US6534242B2Multiple exposure device formationCANON KK·Filed 2001·Granted Mar 18, 2003·41 cites·104 claims
- 1691US5673102AImage farming and microdevice manufacturing method and exposure apparatus in which a light source includes four quadrants of predetermined intensityCANON KK·Filed 1995·Granted Sep 30, 1997·74 cites·54 claims
- 1791US5309197AProjection exposure apparatusCANON KK·Filed 1992·Granted May 3, 1994·76 cites·11 claims
- 1891US4851882AIllumination optical systemCANON KK·Filed 1988·Granted Jul 25, 1989·74 cites·34 claims
- 1990US4883359AAlignment method and pattern forming method using the sameCANON KK·Filed 1988·Granted Nov 28, 1989·57 cites·2 claims
- 2090US4871257AOptical apparatus for observing patterned articleCANON KK·Filed 1988·Granted Oct 3, 1989·56 cites·5 claims
- 2190US4688932AExposure apparatusCANON KK·Filed 1986·Granted Aug 25, 1987·59 cites·17 claims
- 2290US4645924AObservation apparatus with selective light diffusionCANON KK·Filed 1983·Granted Feb 24, 1987·48 cites·24 claims
- 2389US6992750B2Exposure apparatus and methodCANON KK·Filed 2003·Granted Jan 31, 2006·36 cites·5 claims
- 2489US5359407AOptical scanning apparatus, surface-state inspection apparatus and exposure apparatusCANON KK·Filed 1994·Granted Oct 25, 1994·61 cites·9 claims
- 2589US5017798ASurface examining apparatus for detecting the presence of foreign particles on two or more surfacesCANON KK·Filed 1989·Granted May 21, 1991·57 cites·12 claims
- 2689US4634240AOptical apparatus using polarized lightCANON KK·Filed 1984·Granted Jan 6, 1987·49 cites·15 claims
- 2788US5331371AAlignment and exposure methodCANON KK·Filed 1993·Granted Jul 19, 1994·60 cites·15 claims
- 2888US5117254AProjection exposure apparatusCANON KK·Filed 1991·Granted May 26, 1992·61 cites·60 claims
- 2987US5171965AExposure method and apparatusCANON KK·Filed 1991·Granted Dec 15, 1992·51 cites·77 claims
- 3087US5160957AAlignment and exposure apparatusCANON KK·Filed 1991·Granted Nov 3, 1992·52 cites·27 claims
- 3187US5140366AExposure apparatus with a function for controlling alignment by use of latent imagesCANON KK·Filed 1991·Granted Aug 18, 1992·59 cites·22 claims
- 3287US3988066ALight exposure apparatus for printingCANON KK·Filed 1974·Granted Oct 26, 1976·33 cites·15 claims
- 3386US6128068AProjection exposure apparatus including an illumination optical system that forms a secondary light source with a particular intensity distributionCANON KK·Filed 1995·Granted Oct 3, 2000·52 cites·2 claims
- 3486US6104472AProjection exposure apparatus and device manufacturing methodCANON KK·Filed 1997·Granted Aug 15, 2000·60 cites·21 claims
- 3586US5048967ADetection optical system for detecting a pattern on an objectCANON KK·Filed 1990·Granted Sep 17, 1991·49 cites·19 claims
- 3686US4952970AAutofocusing system for a projecting exposure apparatusCANON KK·Filed 1989·Granted Aug 28, 1990·41 cites·30 claims
- 3786US4834540AProjection exposure apparatusCANON KK·Filed 1987·Granted May 30, 1989·44 cites·16 claims
- 3885USD406253SEngine power assisted bicycleYAMAHA MOTOR CO LTD·Filed 1997·Granted Mar 2, 1999·31 cites·1 claims
- 3985US5160962AProjection exposure apparatusCANON KK·Filed 1991·Granted Nov 3, 1992·49 cites·11 claims
- 4085US5133603ADevice for observing alignment marks on a mask and waferCANON KK·Filed 1991·Granted Jul 28, 1992·48 cites·31 claims
- 4185US4795911ASurface examining apparatus for detecting the presence of foreign particles on the surfaceCANON KK·Filed 1987·Granted Jan 3, 1989·54 cites·2 claims
- 4284US7573563B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Aug 11, 2009·7 cites·5 claims
- 4384US5166754AAlignment systemCANON KK·Filed 1992·Granted Nov 24, 1992·44 cites·35 claims
- 4484US4886975ASurface examining apparatus for detecting the presence of foreign particles on two or more surfacesCANON KK·Filed 1989·Granted Dec 12, 1989·44 cites·3 claims
- 4583US5268744AMethod of positioning a wafer with respect to a focal plane of an optical systemCANON KK·Filed 1991·Granted Dec 7, 1993·42 cites·42 claims
- 4683US4780615AAlignment system for use in pattern transfer apparatusCANON KK·Filed 1987·Granted Oct 25, 1988·35 cites·14 claims
- 4781US4711568AExposure apparatusCANON KK·Filed 1986·Granted Dec 8, 1987·39 cites·9 claims
- 4880US10092979B2Laser irradiation apparatusGIGAPHOTON INC·Filed 2018·Granted Oct 9, 2018·1 cites·9 claims
- 4980US7214453B2Mask and its manufacturing method, exposure, and device fabrication methodCANON KK·Filed 2004·Granted May 8, 2007·16 cites·10 claims
- 5080US5489966AProjection exposure apparatusCANON KK·Filed 1994·Granted Feb 6, 1996·33 cites·13 claims
Showing the top 50 of 132 patent records by PatentIndex Score.
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