Inventor · disambiguated record
Michio Kohno
Also filed as: KOHNO MICHIO
32 granted patents·2 pending applications·1,131 citations·filing 1985–2005
98Inventor score
Files withCANON KK32
Top patents by PatentIndex Score
34 records- 0193US4653903AExposure apparatusCANON KK·Filed 1985·Granted Mar 31, 1987·76 cites·11 claims
- 0292US6999157B2Illumination optical system and method, and exposure apparatusCANON KK·Filed 2003·Granted Feb 14, 2006·39 cites·16 claims
- 0390US5774575AInspection apparatus, and exposure apparatus and device manufacturing method using the inspection apparatusCANON KK·Filed 1996·Granted Jun 30, 1998·80 cites·38 claims
- 0490US4871257AOptical apparatus for observing patterned articleCANON KK·Filed 1988·Granted Oct 3, 1989·56 cites·5 claims
- 0589US5359407AOptical scanning apparatus, surface-state inspection apparatus and exposure apparatusCANON KK·Filed 1994·Granted Oct 25, 1994·61 cites·9 claims
- 0689US5017798ASurface examining apparatus for detecting the presence of foreign particles on two or more surfacesCANON KK·Filed 1989·Granted May 21, 1991·57 cites·12 claims
- 0785US6603530B1Exposure apparatus that illuminates a mark and causes light from the mark to be incident on a projection optical systemCANON KK·Filed 2000·Granted Aug 5, 2003·33 cites·12 claims
- 0885US5585916ASurface inspecting deviceCANON KK·Filed 1994·Granted Dec 17, 1996·64 cites·16 claims
- 0985US4795911ASurface examining apparatus for detecting the presence of foreign particles on the surfaceCANON KK·Filed 1987·Granted Jan 3, 1989·54 cites·2 claims
- 1084US4886975ASurface examining apparatus for detecting the presence of foreign particles on two or more surfacesCANON KK·Filed 1989·Granted Dec 12, 1989·44 cites·3 claims
- 1183US5381225ASurface-condition inspection apparatusCANON KK·Filed 1994·Granted Jan 10, 1995·58 cites·34 claims
- 1283US4705940AFocus detection in a projection optical systemCANON KK·Filed 1985·Granted Nov 10, 1987·34 cites·7 claims
- 1382US5528360ASurface-condition inspection apparatusCANON KK·Filed 1995·Granted Jun 18, 1996·60 cites·10 claims
- 1482US5162867ASurface condition inspection method and apparatus using image transferCANON KK·Filed 1991·Granted Nov 10, 1992·53 cites·24 claims
- 1580US4831274ASurface inspecting device for detecting the position of foreign matter on a substrateCANON KK·Filed 1987·Granted May 16, 1989·42 cites·4 claims
- 1678US7292316B2Illumination optical system and exposure apparatus having the sameCANON KK·Filed 2004·Granted Nov 6, 2007·15 cites·4 claims
- 1776US5652657AInspection system for original with pellicleCANON KK·Filed 1995·Granted Jul 29, 1997·44 cites·6 claims
- 1876US5581348ASurface inspecting device using bisected multi-mode laser beam and system having the sameCANON KK·Filed 1996·Granted Dec 3, 1996·46 cites·15 claims
- 1975US4865455AOptical device having a variable geometry filter usable for aligning a mask or reticle with a waferCANON KK·Filed 1989·Granted Sep 12, 1989·22 cites·11 claims
- 2071US5963316AMethod and apparatus for inspecting a surface stateCANON KK·Filed 1997·Granted Oct 5, 1999·32 cites·5 claims
- 2171US4999511ASurface state inspecting device for inspecting the state of parallel first and second surfacesCANON KK·Filed 1990·Granted Mar 12, 1991·34 cites·15 claims
- 2265US5591985ASurface state inspecting system including a scanning optical system for scanning a surface to be inspected with a first light and for simultaneously scanning a diffraction grating with a second lightCANON KK·Filed 1995·Granted Jan 7, 1997·27 cites·8 claims
- 2365US5448350ASurface state inspection apparatus and exposure apparatus including the sameCANON KK·Filed 1994·Granted Sep 5, 1995·19 cites·16 claims
- 2464US5399867AForeign particle inspection apparatusCANON KK·Filed 1994·Granted Mar 21, 1995·21 cites·16 claims
- 2557US6857764B2Illumination optical system and exposure apparatus having the sameCANON KK·Filed 1999·Granted Feb 22, 2005·16 cites·39 claims
- 2655US5105092AInspecting apparatus having a detection sensitivity controller meansCANON KK·Filed 1991·Granted Apr 14, 1992·23 cites·8 claims
- 2751US7079220B2Illumination optical system and method, and exposure apparatusCANON KK·Filed 2005·Granted Jul 18, 2006·0 cites·4 claims
- 2851US5581089AApparatus and method for inspecting a reticle for color centersCANON KK·Filed 1994·Granted Dec 3, 1996·12 cites·7 claims
- 2941US6833905B2Illumination apparatus, projection exposure apparatus, and device fabricating methodCANON KK·Filed 2002·Granted Dec 21, 2004·0 cites·12 claims
- 3041US5602639ASurface-condition inspection method and apparatus including a plurality of detecting elements located substantially at a pupil plane of a detection optical systemCANON KK·Filed 1995·Granted Feb 11, 1997·8 cites·15 claims
- 3141US2005179881A1Exposure apparatus and methodFiled 2005·Application pending·0 cites
- 3239US2004218164A1Exposure apparatusFiled 2004·Application pending·0 cites
- 3337US6621061B2Exposure method and device manufacturing method using the sameCANON KK·Filed 2001·Granted Sep 16, 2003·0 cites·30 claims
- 3430US4830499AOptical device capable of maintaining pupil imagingCANON KK·Filed 1987·Granted May 16, 1989·1 cites·7 claims
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