Inventor · disambiguated record
Chaeho Kim
Also filed as: KIM CHAEHO
12 granted patents·9 pending applications·291 citations·filing 2005–2025
91Inventor score
Top patents by PatentIndex Score
21 records- 0198US7462571B2Film formation method and apparatus for semiconductor process for forming a silicon nitride filmTOKYO ELECTRON LTD·Filed 2005·Granted Dec 9, 2008·91 cites·15 claims
- 0297US7758920B2Method and apparatus for forming silicon-containing insulating filmTOKYO ELECTRON LTD·Filed 2006·Granted Jul 20, 2010·81 cites·18 claims
- 0395US9130054B2Semiconductor memory devices and methods of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Sep 8, 2015·29 cites·15 claims
- 0494US9536897B2Semiconductor device and method of fabricating the sameYOO DONGCHUL·Filed 2015·Granted Jan 3, 2017·36 cites·19 claims
- 0593US9478561B2Semiconductor memory device and method of fabricating the sameKIM CHAEHO·Filed 2015·Granted Oct 25, 2016·33 cites·20 claims
- 0688US11532639B2Three-dimensional semiconductor memory deviceSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Dec 20, 2022·2 cites·20 claims
- 0788US8343594B2Film formation method and apparatus for semiconductor processTOKYO ELECTRON LTD·Filed 2008·Granted Jan 1, 2013·8 cites·14 claims
- 0884US8980731B2Methods of forming a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2012·Granted Mar 17, 2015·6 cites·20 claims
- 0983US9893082B2Semiconductor memory device and method of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Feb 13, 2018·4 cites·15 claims
- 1074US7959733B2Film formation apparatus and method for semiconductor processTOKYO ELECTRON LTD·Filed 2009·Granted Jun 14, 2011·1 cites·12 claims
- 1157US2025048632A1Semiconductor devices and data storage systems including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1257US2006207504A1Film formation method and apparatus for semiconductor processHASEBE KAZUHIDE·Filed 2006·Application pending·0 cites
- 1356US2005282365A1Film formation apparatus and method for semiconductor processHASEBE KAZUHIDE·Filed 2005·Application pending·0 cites
- 1451US2024206180A1Vertical non-volatile memory devices and methods for manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1551US2025142824A1Semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1650US10109747B2Semiconductor memory devices and methods of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Oct 23, 2018·0 cites·19 claims
- 1748US10208397B2Apparatus for depositing a thin filmSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Feb 19, 2019·0 cites·13 claims
- 1848US2024397716A1Semiconductor device and electronic system having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1947US2025017009A1Semiconductor device and manufacturing method of the same, and electronic systemSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 2039US2015145020A1Semiconductor device and method of fabricating the sameKIM CHAEHO·Filed 2014·Application pending·0 cites
- 2137US2025294754A1Integrated circuit memory devices and electronic systems including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
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