Inventor · disambiguated record
Tetsu Tomine
Also filed as: TOMINE TETSU
6 granted patents·15 citations·filing 2006–2010
75Inventor score
Top patents by PatentIndex Score
6 records- 0178US7826916B2Method and system for controlling semiconductor manufacturing equipmentSEIKO EPSON CORP·Filed 2006·Granted Nov 2, 2010·6 cites·7 claims
- 0278US7684903B2Method and system for controlling semiconductor manufacturing apparatusSEIKO EPSON CORP·Filed 2007·Granted Mar 23, 2010·7 cites·15 claims
- 0358US7937189B2Method and system for controlling semiconductor manufacturing equipmentSEIKO EPSON CORP·Filed 2009·Granted May 3, 2011·2 cites·8 claims
- 0450US7853347B2Semiconductor manufacturing system, controller, semiconductor manufacturing system control method, and processing liquid collection methodSEIKO EPSON CORP·Filed 2008·Granted Dec 14, 2010·0 cites·8 claims
- 0544US7885728B2Method and system for controlling semiconductor manufacturing apparatusSEIKO EPSON CORP·Filed 2010·Granted Feb 8, 2011·0 cites·12 claims
- 0638US8234013B2Semiconductor manufacturing system and method for waste liquid collectionTOMINE TETSU·Filed 2010·Granted Jul 31, 2012·0 cites·3 claims
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