Inventor · disambiguated record
Masahiro Mukoyama
Also filed as: MUKOYAMA MASAHIRO
4 granted patents·44 citations·filing 2002–2007
76Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0181US7354484B2Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2007·Granted Apr 8, 2008·7 cites·7 claims
- 0279US7275553B2Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2003·Granted Oct 2, 2007·22 cites·27 claims
- 0373US7472713B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jan 6, 2009·4 cites·3 claims
- 0468US7063094B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Jun 20, 2006·11 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →