Inventor · disambiguated record
Yukio Kiba
Also filed as: KIBA YUKIO
5 granted patents·159 citations·filing 1997–2011
82Inventor score
Top patents by PatentIndex Score
5 records- 0188US5939130ACoating film forming method and coating film forming apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Aug 17, 1999·84 cites·23 claims
- 0268US5866307AResist processing method and resist processing systemTOKYO ELECTRON LTD·Filed 1997·Granted Feb 2, 1999·34 cites·22 claims
- 0367US7387455B2Substrate processing device, substrate processing method, and developing deviceTOKYO ELECTRON LTD·Filed 2003·Granted Jun 17, 2008·13 cites·50 claims
- 0465US6217657B1Resist processing system having process solution deaeration mechanismTOKYO ELECTRON LTD·Filed 1998·Granted Apr 17, 2001·28 cites·10 claims
- 0528US8518480B2Developing treatment method, program, computer storage medium and developing treatment systemSATO NORIFUMI·Filed 2011·Granted Aug 27, 2013·0 cites·23 claims
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