Inventor · disambiguated record
Naokichi Hosokawa
Also filed as: HOSOKAWA NAOKICHI
4 granted patents·222 citations·filing 1974–1994
82Inventor score
Top patents by PatentIndex Score
4 records- 0187US5458759AMagnetron sputtering cathode apparatusANELVA CORP·Filed 1994·Granted Oct 17, 1995·61 cites·12 claims
- 0286US4604180ATarget assembly capable of attaining a high step coverage ratio in a magnetron-type sputtering deviceANELVA CORP·Filed 1985·Granted Aug 5, 1986·59 cites·18 claims
- 0383US5382344ASputtering apparatusANELVA CORP·Filed 1994·Granted Jan 17, 1995·68 cites·15 claims
- 0478US3984301ASputter-etching method employing fluorohalogenohydrocarbon etching gas and a planar electrode for a glow dischargeNIPPON ELECTRIC VARIAN LTD·Filed 1974·Granted Oct 5, 1976·34 cites·9 claims
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