Inventor · disambiguated record
Hyoungkyu Son
Also filed as: SON HYOUNGKYU
3 granted patents·4 pending applications·0 citations·filing 2020–2025
41Inventor score
Files withSEMES CO LTD7
Top patents by PatentIndex Score
7 records- 0163US2025166977A1Substrate treating apparatus and substrate support unitSEMES CO LTD·Filed 2025·Application pending·0 cites
- 0261US12249491B2Substrate treating apparatus and substrate support unitSEMES CO LTD·Filed 2021·Granted Mar 11, 2025·0 cites·9 claims
- 0357US12456606B2Support unit and apparatus for treating substrateSEMES CO LTD·Filed 2021·Granted Oct 28, 2025·0 cites·19 claims
- 0453US2023369029A1Substrate processing deviceSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0547US2024177976A1Liner structure and substrate processing apparatus including the sameSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0639US11915905B2Support unit and substrate treating apparatus including the sameSEMES CO LTD·Filed 2020·Granted Feb 27, 2024·0 cites·15 claims
- 0735US2021005424A1Shower head unit and system for treating substrate with the shower head unitSEMES CO LTD·Filed 2020·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →