Inventor · disambiguated record
Chih-Shen Yang
Also filed as: YANG CHIH-SHEN
11 granted patents·3 pending applications·20 citations·filing 2000–2025
83Inventor score
Technology areasH10P
Top patents by PatentIndex Score
14 records- 0191US11414757B2Gas tube, gas supply system and manufacturing method of semiconductor device using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 16, 2022·7 cites·16 claims
- 0284US12378668B2Gas tube, gas supply system and manufacturing method of semiconductor device using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Aug 5, 2025·0 cites·20 claims
- 0384US2025305139A1Gas tube, gas supply system and manufacturing method of semiconductor device using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0475US12037687B2Gas tube, gas supply system and manufacturing method of semiconductor device using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 16, 2024·0 cites·20 claims
- 0575US11854841B2Space filling device for wet benchTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 26, 2023·0 cites·20 claims
- 0673US2024087917A1Space filling device for wet benchTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0767US6336787B1Method for transferring wafers in a semiconductor tape-peeling apparatusMOSEL VITELIC INC·Filed 2000·Granted Jan 8, 2002·13 cites·2 claims
- 0866US2024014016A1Semiconductor processing apparatus for generating plasmaTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0959US11482430B2Space filling device for wet benchTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 25, 2022·0 cites·20 claims
- 1058US12374530B2Semiconductor processing apparatus for generating plasmaTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 29, 2025·0 cites·20 claims
- 1149US11270950B2Apparatus and method for forming alignment marksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 8, 2022·0 cites·20 claims
- 1249US11075104B2Semiconductor chuck and method of makingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 27, 2021·0 cites·20 claims
- 1347US10964559B2Wafer etching apparatus and method for controlling etch bath of waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Mar 30, 2021·0 cites·20 claims
- 1430US7141739B2Sealing device and apparatusTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Nov 28, 2006·0 cites·27 claims
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