Inventor · disambiguated record
Baerbel Schwaer
Also filed as: SCHWAER BAERBEL
6 granted patents·2 pending applications·58 citations·filing 2005–2012
81Inventor score
Technology areasG03F
Top patents by PatentIndex Score
8 records- 0195US7830611B2Projection objective of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2008·Granted Nov 9, 2010·34 cites·48 claims
- 0291US7990622B2Projection objective of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2010·Granted Aug 2, 2011·7 cites·47 claims
- 0388US7782440B2Projection lens system of a microlithographic projection exposure installationZEISS CARL SMT AG·Filed 2005·Granted Aug 24, 2010·8 cites·4 claims
- 0484US7486382B2Imaging device in a projection exposure machineZEISS CARL SMT AG·Filed 2005·Granted Feb 3, 2009·8 cites·19 claims
- 0565US8319944B2Projection lens system of a microlithographic projection exposure installationBEIERL HELMUT·Filed 2010·Granted Nov 27, 2012·1 cites·20 claims
- 0658US9164396B2Projection lens system of a microlithographic projection exposure installationZEISS CARL SMT GMBH·Filed 2012·Granted Oct 20, 2015·0 cites·20 claims
- 0758US2009141258A1Imaging Device in a Projection Exposure MachineZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 0845US2010128367A1Projection objective for a microlithography apparatus and methodZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
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