Inventor · disambiguated record
Fritz Gans
Also filed as: GANS FRITZ
4 granted patents·2 pending applications·30 citations·filing 2000–2003
74Inventor score
Top patents by PatentIndex Score
6 records- 0173US6627392B2Method of transferring a pattern of high structure density by multiple exposure of less dense partial patternsINFINEON TECHNOLOGIES AG·Filed 2002·Granted Sep 30, 2003·14 cites·12 claims
- 0261US6692875B2Mask for optical projection systems, and a process for its productionINFINEON TECHNOLOGIES AG·Filed 2001·Granted Feb 17, 2004·7 cites·14 claims
- 0359US6466373B1Trimming mask with semitransparent phase-shifting regionsSIEMENS AG·Filed 2000·Granted Oct 15, 2002·7 cites·11 claims
- 0445US6953644B2Method for compensating for scatter/reflection effects in particle beam lithographyINFINEON TECHNOLOGIES AG·Filed 2003·Granted Oct 11, 2005·2 cites·11 claims
- 0533US2005016468A1Compensation frame for receiving a substrateFiled 2003·Application pending·0 cites
- 0631US2001021476A1Phase maskFiled 2001·Application pending·0 cites
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