Inventor · disambiguated record
Mitsuru Ushijima
Also filed as: USHIJIMA MITSURU
13 granted patents·1 pending application·1,015 citations·filing 1989–2009
94Inventor score
Top patents by PatentIndex Score
14 records- 0197US5393624AMethod and apparatus for manufacturing a semiconductor deviceTOKYO ELECTRON LTD·Filed 1992·Granted Feb 28, 1995·228 cites·6 claims
- 0297US5002008ACoating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by stateTOKYO ELECTRON LTD·Filed 1989·Granted Mar 26, 1991·115 cites·12 claims
- 0395US4985722AApparatus for coating a photo-resist film and/or developing it after being exposedTOKYO ELECTRON LTD·Filed 1989·Granted Jan 15, 1991·144 cites·11 claims
- 0493US5442416AResist processing methodTOKYO ELECTRON LTD·Filed 1994·Granted Aug 15, 1995·138 cites·66 claims
- 0592US5202716AResist process systemTOKYO ELECTRON LTD·Filed 1992·Granted Apr 13, 1993·146 cites·11 claims
- 0690US5177514AApparatus for coating a photo-resist film and/or developing it after being exposedTOKYO ELECTRON LTD·Filed 1990·Granted Jan 5, 1993·75 cites·8 claims
- 0790US5089305ACoating apparatus and method for applying a liquid to a semiconductor wafer including selecting a nozzle on a stand by stateTOKYO ELECTRON LTD·Filed 1990·Granted Feb 18, 1992·74 cites·6 claims
- 0887US5339128AResist processing methodTOKYO ELECTRON LTD·Filed 1993·Granted Aug 16, 1994·81 cites·30 claims
- 0951US7169283B2Anodization device and anodization methodTOKYO ELECTRON LTD·Filed 2003·Granted Jan 30, 2007·3 cites·16 claims
- 1047US7118663B2Anodic oxidizer, anodic oxidation methodTOKYO ELECTRON LTD·Filed 2002·Granted Oct 10, 2006·1 cites·12 claims
- 1146US2011247560A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1243US7569124B2Anodic oxidation apparatusTOKYO ELECTRON LTD AND MATSUSH·Filed 2004·Granted Aug 4, 2009·2 cites·7 claims
- 1342US8574676B2Substrate processing methodYASUI KANJI·Filed 2009·Granted Nov 5, 2013·0 cites·18 claims
- 1435US6378078B1Semiconductor integrated circuit supervising an illicit address operationNEC CORP·Filed 1999·Granted Apr 23, 2002·8 cites·9 claims
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