Inventor · disambiguated record
Yasufumi Koyama
Also filed as: KOYAMA YASUFUMI
14 granted patents·1 pending application·328 citations·filing 1988–2008
93Inventor score
Top patents by PatentIndex Score
15 records- 0189US7317961B2Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2006·Granted Jan 8, 2008·15 cites·11 claims
- 0285US6937917B2Substrate processing apparatus, operation method thereof and programDAINIPPON SCREEN MFG·Filed 2003·Granted Aug 30, 2005·35 cites·19 claims
- 0383US7069099B2Method of transporting and processing substrates in substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2004·Granted Jun 27, 2006·27 cites·6 claims
- 0483US5906469AApparatus and method for detecting and conveying substrates in cassetteDAINIPPON SCREEN MFG·Filed 1996·Granted May 25, 1999·90 cites·21 claims
- 0581US6837632B2Substrate treating apparatusDAINIPPON SCREEN MFG·Filed 2003·Granted Jan 4, 2005·30 cites·31 claims
- 0675US7525650B2Substrate processing apparatus for performing photolithographyDAINIPPON SCREEN MFG·Filed 2004·Granted Apr 28, 2009·19 cites·8 claims
- 0774US6253118B1Substrate transport method and apparatusDAINIPPON SCREEN MFG·Filed 1998·Granted Jun 26, 2001·47 cites·36 claims
- 0874US5111332AMethod of and apparatus for controlling deflection of optical beamsDAINIPPON SCREEN MFG·Filed 1991·Granted May 5, 1992·39 cites·20 claims
- 0958US7497912B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2004·Granted Mar 3, 2009·6 cites·7 claims
- 1056US7563323B2Substrate treating apparatusDAINIPPON SCREEN MFG·Filed 2004·Granted Jul 21, 2009·5 cites·12 claims
- 1148US7229240B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2004·Granted Jun 12, 2007·2 cites·9 claims
- 1247US2009014126A1Substrate processing apparatus and substrate processing methodSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 1341US4896169ALaser scan recording apparatus using aperture plates to form shifted rows of beams which are modulated and converged on photosensitive materialDAINIPPON SCREEN MFG·Filed 1988·Granted Jan 23, 1990·8 cites·12 claims
- 1432US5184313AConversion device for laser interferometic measuring apparatusDAINIPPON SCREEN MFG·Filed 1990·Granted Feb 2, 1993·4 cites·9 claims
- 1530US5065445AApparatus for expanding and formatting runlength data for multiple exposure beamsDAINIPPON SCREEN MFG·Filed 1988·Granted Nov 12, 1991·1 cites·9 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →