Inventor · disambiguated record
Yoshiteru Fukutomi
Also filed as: FUKUTOMI YOSHITERU
27 granted patents·9 pending applications·767 citations·filing 1991–2024
97Inventor score
Files withDAINIPPON SCREEN MFG12SOKUDO CO LTD8SCREEN SEMICONDUCTOR SOLUTIONS CO LTD7FUKUTOMI YOSHITERU6OGURA HIROYUKI3
Top patents by PatentIndex Score
36 records- 0196US8851008B2Parallel substrate treatment for a plurality of substrate treatment linesFUKUTOMI YOSHITERU·Filed 2008·Granted Oct 7, 2014·24 cites·5 claims
- 0296US6893171B2Substrate treating apparatusDAINIPPON SCREEN MFG·Filed 2003·Granted May 17, 2005·131 cites·22 claims
- 0394US8545118B2Substrate treating apparatus with inter-unit buffersOGURA HIROYUKI·Filed 2008·Granted Oct 1, 2013·25 cites·28 claims
- 0493US8708587B2Substrate treating apparatus with inter-unit buffersSOKUDO CO LTD·Filed 2013·Granted Apr 29, 2014·14 cites·20 claims
- 0592US9165807B2Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust unitsFUKUTOMI YOSHITERU·Filed 2012·Granted Oct 20, 2015·10 cites·3 claims
- 0692US7641405B2Substrate processing apparatus with integrated top and edge cleaning unitSOKUDO CO LTD·Filed 2008·Granted Jan 5, 2010·20 cites·10 claims
- 0790US9184071B2Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating unitsOGURA HIROYUKI·Filed 2008·Granted Nov 10, 2015·17 cites·12 claims
- 0887US6752543B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2003·Granted Jun 22, 2004·38 cites·8 claims
- 0986US12217986B2Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substratesSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2021·Granted Feb 4, 2025·1 cites·7 claims
- 1085US8985937B2Stocker apparatus and substrate treating apparatusFUKUTOMI YOSHITERU·Filed 2011·Granted Mar 24, 2015·6 cites·19 claims
- 1185US2025140584A1Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substratesSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2024·Application pending·0 cites
- 1283US5906469AApparatus and method for detecting and conveying substrates in cassetteDAINIPPON SCREEN MFG·Filed 1996·Granted May 25, 1999·90 cites·21 claims
- 1382US9230834B2Substrate treating apparatusFUKUTOMI YOSHITERU·Filed 2012·Granted Jan 5, 2016·4 cites·19 claims
- 1482US2023042033A1Substrate treating apparatusSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2022·Application pending·0 cites
- 1580US9174235B2Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment linesFUKUTOMI YOSHITERU·Filed 2012·Granted Nov 3, 2015·3 cites·10 claims
- 1680US5677000ASubstrate spin treating method and apparatusDAINIPPON SCREEN MFG·Filed 1996·Granted Oct 14, 1997·62 cites·15 claims
- 1780US5430271AMethod of heat treating a substrate with standby and treatment time periodsDAINIPPON SCREEN MFG·Filed 1993·Granted Jul 4, 1995·80 cites·20 claims
- 1878US9687874B2Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating unitsSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2015·Granted Jun 27, 2017·2 cites·4 claims
- 1977US10290521B2Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipeSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2015·Granted May 14, 2019·1 cites·12 claims
- 2077US5322079ASubstrate holding apparatus of a simple structure for holding a rotating substrate, and a substrate processing apparatus including the substrate holding apparatusDAINIPPON SCREEN MFG·Filed 1992·Granted Jun 21, 1994·63 cites·23 claims
- 2173US9368383B2Substrate treating apparatus with substrate reorderingSOKUDO CO LTD·Filed 2014·Granted Jun 14, 2016·2 cites·15 claims
- 2271US5639301AProcessing apparatus having parts for thermal and non-thermal treatment of substratesDAINIPPON SCREEN MFG·Filed 1995·Granted Jun 17, 1997·42 cites·21 claims
- 2370US9299596B2Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substratesOGURA HIROYUKI·Filed 2008·Granted Mar 29, 2016·2 cites·17 claims
- 2470US8031324B2Substrate processing apparatus with integrated cleaning unitSOKUDO CO LTD·Filed 2008·Granted Oct 4, 2011·3 cites·8 claims
- 2569US5765072ATreating solution supplying method and substrate treating apparatusDAINIPPON SCREEN MFG·Filed 1997·Granted Jun 9, 1998·36 cites·22 claims
- 2667US5792259ASubstrate processing apparatus and air supply method in substrate processing apparatusDAINIPPON SCREEN MFG·Filed 1996·Granted Aug 11, 1998·21 cites·13 claims
- 2767US2019221457A1Substrate treating apparatusSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2019·Application pending·0 cites
- 2855US5359785ASubstrate transport apparatusDAINIPPON SCREEN MFG·Filed 1992·Granted Nov 1, 1994·24 cites·18 claims
- 2954US2009165711A1Substrate treating apparatus with substrate reorderingSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 3054US2016163573A1Substrate treating apparatus with parallel substrate treatment linesSCREEN SEMICONDUCTOR SOLUTIONS CO LTD·Filed 2016·Application pending·0 cites
- 3150US5308210AInterface apparatus for transporting substrates between substrate processing apparatusDAINIPPON SCREEN MFG·Filed 1993·Granted May 3, 1994·22 cites·7 claims
- 3250US5201653ASubstrate heat-treating apparatusDAINIPPON SCREEN MFG·Filed 1991·Granted Apr 13, 1993·24 cites·5 claims
- 3348US2009139833A1Multi-line substrate treating apparatusSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 3447US2008212049A1Substrate processing apparatus with high throughput development unitsSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 3547US2008196658A1Substrate processing apparatus including a substrate reversing regionSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 3645US2010228378A1Stocker apparatus and substrate treating apparatusFUKUTOMI YOSHITERU·Filed 2010·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →