Inventor · disambiguated record
Laurentius Johannes Adrianus Van Bokhoven
Also filed as: VAN BOKHOVEN LAURENTIUS JOHANN · VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS
23 granted patents·4 pending applications·17 citations·filing 2009–2023
91Inventor score
Files withASML NETHERLANDS BV18ASML HOLDING NV2VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS2GOSEN JEROEN GERARD1LAFARRE RAYMOND WILHELMUS LOUIS1
Top patents by PatentIndex Score
27 records- 0191US8730448B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted May 20, 2014·9 cites·19 claims
- 0283US10222713B2Patterning device cooling apparatusASML NETHERLANDS BV·Filed 2016·Granted Mar 5, 2019·2 cites·20 claims
- 0380US10394139B2Patterning device cooling apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 27, 2019·2 cites·21 claims
- 0476US9939740B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Apr 10, 2018·2 cites·21 claims
- 0571US8755026B2Lithographic apparatus and a device manufacturing methodGOSEN JEROEN GERARD·Filed 2010·Granted Jun 17, 2014·2 cites·21 claims
- 0664US10705438B2Lithographic methodASML NETHERLANDS BV·Filed 2019·Granted Jul 7, 2020·0 cites·20 claims
- 0762US12461448B2Multi-channel light source for projection optics heatingASML NETHERLANDS BV·Filed 2021·Granted Nov 4, 2025·0 cites·24 claims
- 0861US10990025B2Patterning device cooling apparatusASML NETHERLANDS BV·Filed 2019·Granted Apr 27, 2021·0 cites·21 claims
- 0961US10642166B2Patterning device cooling apparatusASML NETHERLANDS BV·Filed 2019·Granted May 5, 2020·0 cites·20 claims
- 1056US12422758B2Lithographic apparatus, temperature sensor, and fiber Bragg grating sensorASML HOLDING NV·Filed 2022·Granted Sep 23, 2025·0 cites·17 claims
- 1156US12078938B2Method and apparatus for predicting aberrations in a projection systemASML NETHERLANDS BV·Filed 2020·Granted Sep 3, 2024·0 cites·20 claims
- 1256US10571814B2Lithographic methodASML NETHERLANDS BV·Filed 2017·Granted Feb 25, 2020·0 cites·11 claims
- 1353US2023400785A1Conditioning apparatus and methodASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1451US10908517B2Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Feb 2, 2021·0 cites·15 claims
- 1548US11644755B2Lithographic methodASML NETHERLANDS BV·Filed 2019·Granted May 9, 2023·0 cites·20 claims
- 1647US2023176492A1Optical system and method of operating an optical systemZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 1745US8848164B2Fluid supply system, a lithographic apparatus, a method of varying fluid flow rate and a device manufacturing methodVAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS·Filed 2011·Granted Sep 30, 2014·0 cites·21 claims
- 1845US8553206B2Lithographic apparatus, coverplate and device manufacturing methodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2010·Granted Oct 8, 2013·0 cites·17 claims
- 1944US10423081B2Reticle cooling by non-uniform gas flowASML HOLDING NV·Filed 2015·Granted Sep 24, 2019·0 cites·24 claims
- 2044US9625828B2Fluid handling structure, lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2011·Granted Apr 18, 2017·0 cites·20 claims
- 2144US2010060868A1Fluid handling structure, lithographic apparatus and device manufactuirng methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 2243US11048178B2Lithographic apparatus with improved patterning performanceASML NETHERLANDS BV·Filed 2018·Granted Jun 29, 2021·0 cites·20 claims
- 2343US10031428B2Gas flow optimization in reticle stage environmentASML NETHERLANDS BV·Filed 2014·Granted Jul 24, 2018·0 cites·38 claims
- 2442US10281830B2Patterning device cooling systems in a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted May 7, 2019·0 cites·18 claims
- 2540US2011069289A1Lithographic apparatus, coverplate and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 2637US10095129B2Lithographic apparatus and a method of manufacturing a device using a lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 9, 2018·0 cites·20 claims
- 2733US8405819B2Immersion lithographic apparatus and device manufacturing methodVAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS·Filed 2010·Granted Mar 26, 2013·0 cites·22 claims
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