Inventor · disambiguated record
Damon Tyrone Genetti
Also filed as: GENETTI DAMON · GENETTI DAMON TYRONE
21 granted patents·3 pending applications·1,117 citations·filing 1999–2022
96Inventor score
Top patents by PatentIndex Score
24 records- 0197US10062599B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2016·Granted Aug 28, 2018·30 cites·24 claims
- 0297US9881820B2Front opening ring podLAM RES CORP·Filed 2016·Granted Jan 30, 2018·124 cites·29 claims
- 0396US10124492B2Automated replacement of consumable parts using end effectors interfacing with plasma processing systemLAM RES CORP·Filed 2016·Granted Nov 13, 2018·25 cites·26 claims
- 0496US10062589B2Front opening ring podLAM RES CORP·Filed 2017·Granted Aug 28, 2018·20 cites·19 claims
- 0596US10062590B2Front opening ring podLAM RES CORP·Filed 2017·Granted Aug 28, 2018·23 cites·19 claims
- 0696US8060252B2High throughput method of in transit wafer position correction in system using multiple robotsGAGE CHRIS·Filed 2007·Granted Nov 15, 2011·571 cites·19 claims
- 0795US8033769B2Loadlock designs and methods for using sameNOVELLUS SYSTEMS INC·Filed 2007·Granted Oct 11, 2011·42 cites·20 claims
- 0891US10541168B2Edge ring centering method using ring dynamic alignment dataLAM RES CORP·Filed 2017·Granted Jan 21, 2020·9 cites·19 claims
- 0991US8489237B2High throughput method of in transit wafer position correction in a system using multiple robotsGAGE CHRIS·Filed 2011·Granted Jul 16, 2013·12 cites·16 claims
- 1090US6405101B1Wafer centering system and methodNOVELLUS SYSTEMS INC·Filed 1999·Granted Jun 11, 2002·134 cites·30 claims
- 1189US6934606B1Automatic calibration of a wafer-handling robotNOVELLUS SYSTEMS INC·Filed 2003·Granted Aug 23, 2005·89 cites·25 claims
- 1284US10427307B2Automated replacement of consumable parts using end effectors interfacing with plasma processing systemLAM RES CORP·Filed 2017·Granted Oct 1, 2019·3 cites·15 claims
- 1384US9002514B2Wafer position correction with a dual, side-by-side wafer transfer robotGENETTI DAMON·Filed 2007·Granted Apr 7, 2015·12 cites·14 claims
- 1483US10790237B2Fiducial-filtering automatic wafer centering process and associated systemLAM RES CORP·Filed 2018·Granted Sep 29, 2020·4 cites·20 claims
- 1581US10304717B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2017·Granted May 28, 2019·2 cites·20 claims
- 1675US8491248B2Loadlock designs and methods for using sameGAGE CHRIS·Filed 2011·Granted Jul 23, 2013·3 cites·12 claims
- 1774US8099192B2Method and apparatus for teaching a workpiece transfer robotGENETTI DAMON·Filed 2007·Granted Jan 17, 2012·13 cites·22 claims
- 1864US9496159B2Wafer position correction with a dual, side-by-side wafer transfer robotNOVELLUS SYSTEMS INC·Filed 2015·Granted Nov 15, 2016·1 cites·14 claims
- 1963US10770339B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2019·Granted Sep 8, 2020·0 cites·20 claims
- 2053US2025232997A1Adaptive positioning systems and routines using an autocalibration wafer and a calibration wafer with cutoutsLAM RES CORP·Filed 2022·Application pending·0 cites
- 2151US2024278991A1In-line machine vision system for part tracking of substrate processing systemLAM RES CORP·Filed 2022·Application pending·0 cites
- 2248US12142466B2Automated transfer of edge ring requiring rotational alignmentLAM RES CORP·Filed 2020·Granted Nov 12, 2024·0 cites·28 claims
- 2345US10190865B2Verifying end effector flatness using electrical continuityLAM RES CORP·Filed 2016·Granted Jan 29, 2019·0 cites·18 claims
- 2438US2017263478A1Detection System for Tunable/Replaceable Edge Coupling RingLAM RES CORP·Filed 2017·Application pending·0 cites
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