Inventor · disambiguated record

Siegfried Peter Kluge

Also filed as: KLUGE SIEGFRIED PETER

1 granted patent·0 citations·filing 2009–2009

6Inventor score

Technology areasG01B

Files withVISTEC SEMICONDUCTOR SYS GMBH1

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1 record

0132US8351049B2Interferometric device for position measurement and coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2009·Granted Jan 8, 2013·0 cites·12 claims

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