Inventor · disambiguated record
Yih-Song Chiu
Also filed as: CHIU YIH-SONG
4 granted patents·2 pending applications·19 citations·filing 1999–2014
68Inventor score
Top patents by PatentIndex Score
6 records- 0162US7064085B2Feed forward spacer width control in semiconductor manufacturingTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Jun 20, 2006·11 cites·20 claims
- 0253US6972241B2Method of forming an STI feature to avoid electrical charge leakageTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Dec 6, 2005·8 cites·22 claims
- 0347US8049213B2Feature dimension measurementTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Nov 1, 2011·0 cites·9 claims
- 0436US9887095B2System and method for an etch process with silicon concentration controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Feb 6, 2018·0 cites·17 claims
- 0535US2010240220A1Process for stripping photoresist and removing dielectric linerTAIWAN SEMICONDUCTOR MFG·Filed 2010·Application pending·0 cites
- 0621US2001051408A1Method for providing improved step coverage of deep trenches and use thereofFiled 1999·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →